- Gigahertz surface acoustic wave generation on ZnO thin films deposited by radio frequency magnetron sputtering on III-V semiconductor substrates
[作者:Wang, QJ; Pflugl, C; Andress, WF; Ham, D; Capasso, F; Yamanishi, M,期刊:Journal Of Vacuum Science & Technology B, 页码:1848-1851 , 文章类型: Article,,卷期:2008年26-6]
- The authors demonstrate 1.6 GHz surface acoustic wave (SAW) generation using interdigital transducers patterned by e-beam lithography on a thin ZnO piezoelectric film deposited on an InP substrate. The highly oriented, d...
- A new approach to fabricating high density nanoarrays by nanocontact printing
[作者:Gu, J; Xiao, XY; Takulapalli, BR; Morrison, ME; Zhang, P; Zenhausern, F,期刊:Journal Of Vacuum Science & Technology B, 页码:1860-1865 , 文章类型: Article,,卷期:2008年26-6]
- The authors introduce a new scheme of nanocontact printing that fabricates nanoarrays using stamps generated by ultraviolet nanoimprint lithography. Array patterns can be generated by this printing technique in a high de...
- Neutral particle proximity lithography: Noncontact nanoscale printing without charge-related artifacts
[作者:Craver, B; Nounu, H; Wasson, J; Wolfe, JC,期刊:Journal Of Vacuum Science & Technology B, 页码:1866-1870 , 文章类型: Article,,卷期:2008年26-6]
- The authors present neutral particle proximity lithography, a high resolution, parallel exposure technique where a broad beam of energetic neutral particles floods a stencil mask and transmitted beamlets transfer the mas...
- Ge1-ySny photoconductor structures at 1.55 mu m: From advanced materials to prototype devices
[作者:Roucka, R; Xie, J; Kouvetakis, J; Mathews, J; D'Costa, V; Menendez, J; Tolle, J; Yu, SQ,期刊:Journal Of Vacuum Science & Technology B, 页码:1952-1959 , 文章类型: Article,,卷期:2008年26-6]
- Prototype detector structures were fabricated on Si substrates using Ge1-ySny as active material for the first time. This alloy system covers the entire near-IR telecommunication spectrum and grows at a low temperature o...
- Growth of Si nanowires on micropillars for the study of their dopant distribution by atom probe tomography
[作者:Xu, T; Nys, JP; Grandidier, B; Stievenard, D; Coffinier, Y; Boukherroub, R; Larde, R; Cadel, E; Pareige, P,期刊:Journal Of Vacuum Science & Technology B, 页码:1960-1963 , 文章类型: Article,,卷期:2008年26-6]
- This article reports on the growth of Au islands on the Si(111) surface as a function of the Au evaporation rate and the temperature of the surface in ultrahigh vacuum. By controlling the density of the Au islands and th...
- Modifications of dielectric films induced by plasma ashing processes: Hybrid versus porous SiOCH materials
[作者:Darnon, M; Chevolleau, T; David, T; Posseme, N; Ducote, J; Licitra, C; Vallier, L; Joubert, O; Torres, J,期刊:Journal Of Vacuum Science & Technology B, 页码:1964-1970 , 文章类型: Article,,卷期:2008年26-6]
- This work focuses on the impact of oxidizing (O-2) and reducing plasma ashing chemistries (NH3, CH4) on the modifications of dielectric materials in a porous or an hybrid state (SiOCH matrix+porogen). The plasma ashing p...
- Electron beams in individual column cells of multicolumn cell system
[作者:Yamada, A; Yasuda, H; Yamabe, M,期刊:Journal Of Vacuum Science & Technology B, 页码:2025-2031 , 文章类型: Article,,卷期:2008年26-6]
- In the Mask D2I project at ASET, the authors designed a novel electron beam exposure system having the concepts of multicolumn cell (MCC), character projection, and variable shaped beam to improve the throughput of elect...
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