- Quasi-monolithic heat flux microsensor based on porous silicon boxes
[作者:Ziouche, K; Godts, P; Bougrioua, Z; Sion, C; Lasri, T; Leclercq, D,期刊:Sensors And Actuators A-Physical, 页码:35-40 , 文章类型: Article,,卷期:2010年164-1-2]
- A new generation of heat flux microsensors manufactured in CMOS silicon technology with high sensitivities is presented Incident heat flux is converted into periodic superficial temperature gradients by an array of porou...
- Thermo-mechanical properties of alumina films created using the atomic layer deposition technique
[作者:Miller, DC; Foster, RR; Jen, SH; Bertrand, JA; Cunningham, SJ; Morris, AS; Lee, YC; George, SM; Dunn, ML,期刊:Sensors And Actuators A-Physical, 页码:58-67 , 文章类型: Article,,卷期:2010年164-1-2]
- Interdigitated humidity sensors with atomic layer deposited (ALD) coatings of aluminum oxide demonstrated no leakage current relative to uncoated sensors stored in the ambient indicating Al2O3 may be used to limit the ef...
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