- Highly sensitive ZnO thin film bulk acoustic resonator for hydrogen detection - art. no. 115018
[作者:Chen, D; Wang, JJ; Liu, QX; Xu, Y; Li, DH; Liu, YJ,期刊:Journal of Micromechanics and Microengineering, 页码:15018-15018 , 文章类型: Article,,卷期:2011年21-11]
- We apply a thin film bulk acoustic resonator for hydrogen detection. The resonator working at 2.39 GHz consists of a ZnO piezoelectric stack and an Al/W Bragg reflector. A Pd film is coated on the top of a piezoelectric ...
- Sealing of poly-SiGe surface micromachined cavities for MEMS-above-CMOS applications - art. no. 115019
[作者:Gonzalez, P; Guo, B; Pedreira, OV; Severi, S; De Meyer, K; Witvrouw, A,期刊:Journal of Micromechanics and Microengineering, 页码:15019-15019 , 文章类型: Article,,卷期:2011年21-11]
- This paper presents for the first time a study of different methods to seal SiGe surface micromachined cavities for above-CMOS MEMS applications. Four different sealing layers are proposed: sputter-deposited AlCu, sub-at...
- MEMS-actuated wavelength drop filter based on microsphere whispering gallery modes - art. no. 115020
[作者:Blue, R; Li, L; Flockhart, GMH; Uttamchandani, D,期刊:Journal of Micromechanics and Microengineering, 页码:15020-15020 , 文章类型: Article,,卷期:2011年21-11]
- MEMS-enabled tuneable optical coupling between optical microsphere resonators and optical fibre waveguides is reported. We describe the design, fabrication and experimental characterization of a MEMS platform, based on e...
- Electromagnetically actuated micromanipulator using an acoustically oscillating bubble - art. no. 115023
[作者:Kwon, JO; Yang, JS; Lee, SJ; Rhee, K; Chung, SK,期刊:Journal of Micromechanics and Microengineering, 页码:15023-15023 , 文章类型: Article,,卷期:2011年21-11]
- A novel non-invasive micromanipulation technique has been developed where a microrobot swimming in an aqueous medium manipulates micro-objects, through electromagnetic actuation using an acoustically oscillating bubble a...
- Flatness optimization of micro-injection moulded parts: the case of a PMMA microfluidic component - art. no. 115024
[作者:Marson, S; Attia, UM; Lucchetta, G; Wilson, A; Alcock, JR; Allen, DM,期刊:Journal of Micromechanics and Microengineering, 页码:15024-15024 , 文章类型: Article,,卷期:2011年21-11]
- Micro-injection moulding (mu-IM) has attracted a lot of interest because of its potential for the production of low-cost, miniaturized parts in high-volume. Applications of this technology are, amongst others, microfluid...
- A finite element technique for accurate determination of interfacial adhesion force in MEMS using electrostatic actuation - art. no. 115025
[作者:Shavezipur, M; Li, GH; Laboriante, I; Gou, WJ; Carraro, C; Maboudian, R,期刊:Journal of Micromechanics and Microengineering, 页码:15025-15025 , 文章类型: Article,,卷期:2011年21-11]
- This paper reports on accurate analysis of adhesion force between polysilicon-polysilicon surfaces in micro-/nanoelectromechanical systems (M/NEMS). The measurement is carried out using double-clamped beams. Electrostati...
- A mediator embedded micro-immunosensing unit for electrochemical detection on viruses within physiological saline media - art. no. 115031
[作者:Pires, NMM; Dong, T; Yang, ZC; Hoivik, N; Zhao, XY,期刊:Journal of Micromechanics and Microengineering, 页码:15031-15031 , 文章类型: Article,,卷期:2011年21-11]
- To provide a time-and cost-saving alternative to the conventional methods for virus detection in biological media, this work presents an electrochemical micro-immunosensor based on the nickel hexacyanoferrate (NiHCF) red...
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