- Aerodynamic journal bearing with a flexible, damped support operating at 7.2 million DN
[作者:Waumans, T; Peirs, J; Al-Bender, F; Reynaerts, D,期刊:Journal of Micromechanics and Microengineering, 页码:104014-104014 , 文章类型: Proceedings Paper,,卷期:2011年21-10]
- This paper reports on the design, development and experimental validation of an aerodynamic journal bearing with a flexible, damped support operating at speeds up to 1.2 million rpm (= 7.2 million DN). In terms of the DN...
- Streamlined cryogenic deep reactive ion etching protocol for hybrid micronozzle arrays
[作者:Erten, A; Makale, M; Lu, XK; Fruhberger, B; Kesari, S; Esener, S,期刊:Journal of Micromechanics and Microengineering, 页码:105001-105001 , 文章类型: Proceedings Paper,,卷期:2011年21-10]
- This paper describes a novel fabrication methodology for hybrid micronozzle arrays that markedly streamlines and simplifies process flow for cryogenic deep reactive ion etching (DRIE). Cryogenic DRIE utilizes SF6/O-2-bas...
- Superhydrophobic nickel micromesh with microfences
[作者:Lee, JM; Lee, SM; Jung, PG; Ko, JS,期刊:Journal of Micromechanics and Microengineering, 页码:105003-105003 , 文章类型: Proceedings Paper,,卷期:2011年21-10]
- Ni micromeshes with array-type microfences formed along the circumference of the microholes were designed and fabricated, and their characteristics, including their surface wettability and waterproofness, were theoretica...
- MEMS microgrippers with thin gripping tips
[作者:Chen, BK; Zhang, Y; Perovic, DD; Sun, Y,期刊:Journal of Micromechanics and Microengineering, 页码:105004-105004 , 文章类型: Proceedings Paper,,卷期:2011年21-10]
- Gripping small objects requires tool tips of comparable dimensions. Current methods for miniaturizing an MEMS tool entirely down to sub-micrometer in dimensions, however, come with significant tradeoffs in device perform...
- A novel stress isolation guard-ring design for the improvement of a three-axis piezoresistive accelerometer
[作者:Hsieh, HS; Chang, HC; Hu, CF; Cheng, CL; Fang, WL,期刊:Journal of Micromechanics and Microengineering, 页码:105006-105006 , 文章类型: Proceedings Paper,,卷期:2011年21-10]
- This study designs and implements a stress isolation guard-ring structure to improve the performances of the existing single proof-mass three-axis piezoresistive accelerometer. Thus, the environment disturbances, such as...
- Controlling damping and quality factors of silicon microcantilevers by selective metallization
[作者:Sosale, G; Das, K; Frechette, L; Vengallatore, S,期刊:Journal of Micromechanics and Microengineering, 页码:105010-105010 , 文章类型: Proceedings Paper,,卷期:2011年21-10]
- Ceramic microresonators coated with relatively thin metallic films are widely used for sensing, scanning probe microscopy, signal processing and vibration energy harvesting. The metallization improves optical reflectivit...
- A smart and self-sufficient frequency tunable vibration energy harvester
[作者:Eichhorn, C; Tchagsim, R; Wilhelm, N; Woias, P,期刊:Journal of Micromechanics and Microengineering, 页码:104003-104003 , 文章类型: Proceedings Paper,,卷期:2011年21-10]
- We present a piezoelectric energy-harvesting system, which is able to self-tune its resonance frequency in an energy-autonomous way, in order to extend its efficient operation over a large frequency range. The system con...
|