- Fabrication, assembly and heat transfer testing of low-profile copper-based microchannel heat exchangers
[作者:Lu, B; Chen, K; Meng, WJ; Mei, FH,期刊:Journal of Micromechanics and Microengineering, 页码:115002-115002 , 文章类型: 期刊论文,,卷期:2010年20-11]
- Low-profile, Cu-based microchannel heat exchangers (MHEs) with different geometric dimensions were fabricated, bonded and assembled. A transient liquid phase (TLP) process was used for bonding of Cu-based MHEs with total...
- 3C-SiC films on insulated substrates for high-temperature electrostatic-based resonators
[作者:Placidi, M; Perez-Tomas, A; Zielinski, M; Godignon, P; Millan, J; Jorda, X; Mestres, N; Abadal, G,期刊:Journal of Micromechanics and Microengineering, 页码:115007-115007 , 文章类型: 期刊论文,,卷期:2010年20-11]
- Here, we report on a comparison between two different insulated substrates, semi-insulated silicon (SIS) and silicon-on-insulator (SOI), used for the growth of 3C-SiC for electrostatic-based mechanical resonators able to...
- Optimized piranha etching process for SU8-based MEMS and MOEMS construction
[作者:Holmes, M; Keeley, J; Hurd, K; Schmidt, H; Hawkins, A,期刊:Journal of Micromechanics and Microengineering, 页码:115008-115008 , 文章类型: 期刊论文,,卷期:2010年20-11]
- We demonstrate the optimization of the concentration, temperature and cycling of a piranha (H2O2:H2SO4) mixture that produces high yields while quickly etching hollow structures made using a highly crosslinked SU8 polyme...
- Single wafer fabrication of a symmetric double-sided beam-mass structure using DRIE and wet etching by a novel vertical sidewall protection technique
[作者:Zhou, XF; Che, LF; Xiong, B; Fan, KB; Wang, YL; Wang, ZK,期刊:Journal of Micromechanics and Microengineering, 页码:115009-115009 , 文章类型: 期刊论文,,卷期:2010年20-11]
- A symmetric double-sided beam-mass structure is of interest for the design of novel MEMS sensors and actuators. Conventional methods to achieve symmetric beam-mass structures have been heavily dependent on bonding or hea...
- Replica molding for multilevel micro-/nanostructure replication
[作者:Senn, T; Esquivel, JP; Lorgen, M; Sabate, N; Lochel, B,期刊:Journal of Micromechanics and Microengineering, 页码:115012-115012 , 文章类型: 期刊论文,,卷期:2010年20-11]
- The development of micro- and nanofabrication processes with the capability to achieve three-dimensional structures is of great interest for a wide variety of applications. In this paper, a replica molding process for th...
- Micromilling of thin ribs with high aspect ratios
[作者:Li, P; Zdebski, D; Langen, HH; Hoogstrate, AM; Oosterling, JAJ; Schmidt, RHM; Allen, DM,期刊:Journal of Micromechanics and Microengineering, 页码:115013-115013 , 文章类型: 期刊论文,,卷期:2010年20-11]
- Micro features with high aspect ratios are one of the commonly encountered geometries found in micro products. In the literature, these structures are often used in demonstrator products machined by a micromilling proces...
- Analytical and experimental study on the second harmonic mode response of a bulk acoustic wave resonator
[作者:Pang, W; Zhang, H; Ruby, RC; Yu, HY; Kim, ES,期刊:Journal of Micromechanics and Microengineering, 页码:115015-115015 , 文章类型: 期刊论文,,卷期:2010年20-11]
- A one-dimensional Mason model is employed to investigate the second harmonic mode response of a multilayer composite film bulk acoustic resonator (FBAR), particularly the dependence of the effective coupling coefficient ...
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