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  • FEM modeling of SAW organic vapor sensors
    [作者:Zhao, YG; Liu, M; Li, DM; Li, JJ; Niu, JB,期刊:Sensors And Actuators A-Physical, 页码:30-34 , 文章类型: Article,,卷期:2009年154-1]
  • A finite element method (FEM) simulation approach of surface acoustic wave (SAW) organic vapor sensors was investigated. The effects of the polymer coating on the propagation characteristics of the SAW were studied by FE...
  • Polysilicon nanofilm pressure sensor
    [作者:Liu, XW; Lu, XB; Chuai, RY; Shi, CZ; Suo, CG,期刊:Sensors And Actuators A-Physical, 页码:42-45 , 文章类型: Article,,卷期:2009年154-1]
  • Utilizing 80 nm polysilicon nanofilm as piezoresistors, a pressure sensor with high performance is developed. The complete fabrication process is described. The pressure properties of the sensor were measured at the temp...