- Large-area, high-aspect-ratio SU-8 molds for the fabrication of PDMS microfluidic devices - art. no. 045021
[作者:Natarajan, S; Chang-Yen, DA; Gale, BK,期刊:Journal of Micromechanics and Microengineering, 页码:45021-45021 , 文章类型: Article,,卷期:2008年18-4]
- A relatively low-cost fabrication method using soft lithography and molding for large-area, high-aspect-ratio microfluidic devices, which have traditionally been difficult to fabricate, has been developed and is presente...
- Acrylated hyperbranched polymer photoresist for ultra-thick and low-stress high aspect ratio micropatterns - art. no. 045022
[作者:Schmidt, LE; Yi, S; Jin, YH; Leterrier, Y; Cho, YH; Manson, JAE,期刊:Journal of Micromechanics and Microengineering, 页码:45022-45022 , 文章类型: Article,,卷期:2008年18-4]
- Different photocurable acrylates, including two hyperbranched monomers, are compared with an epoxy negative-tone photoresist (SU-8) with respect to their suitability for the fabrication of ultra-thick polymer microstruct...
- Buckled cantilevers for out-of-plane platforms - art. no. 045024
[作者:Johnstone, RW; Ma, AH; Sameoto, D; Parameswaran, M; Leung, AM,期刊:Journal of Micromechanics and Microengineering, 页码:45024-45024 , 文章类型: Article,,卷期:2008年18-4]
- In this paper, we show how surface-micromachined buckled cantilevers can be used to construct out-of-plane structures. We include the relevant theory necessary to predict the height and angle of plates attached to buckle...
- Dynamic mechanical thermal analysis, forming and mold fabrication studies for hot-embossing of a polyimide microfluidic platform - art. no. 045025
[作者:Youn, SW; Noguchi, T; Takahashi, M; Maeda, R,期刊:Journal of Micromechanics and Microengineering, 页码:45025-45025 , 文章类型: Article,,卷期:2008年18-4]
- In this study, we have explored the hot-embossing of polyimide films through dynamic mechanical thermal analysis (DMTA), forming and mold fabrication studies. First, the relationship between the formability and the tempe...
- Polydimethylglutarimide (PMGI) as a structural material for surface micromachining - art. no. 045026
[作者:Foulds, IG; Johnstone, RW; Tsang, SH; Hamidi, M; Parameswaran, M,期刊:Journal of Micromechanics and Microengineering, 页码:45026-45026 , 文章类型: Article,,卷期:2008年18-4]
- This work investigates the use of polydimethylglutarimide, or PMGI, as a structural material for surface micromachining. PMGI is a commercially available, positive-toned deep-UV resist designed for use in bi-layerlift-of...
- Plasma removal of parylene c - art. no. 045004
[作者:Meng, E; Li, PY; Tai, YC,期刊:Journal of Micromechanics and Microengineering, 页码:45004-45004 , 文章类型: Article,,卷期:2008年18-4]
- Parylene C, an emerging material in microelectromechanical systems, is of particular interest in biomedical and lab-on-a-chip applications where stable, chemically inert surfaces are desired. Practical implementation of ...
- Bistable nanowire for micromechanical memory - art. no. 045005
[作者:Charlot, B; Sun, W; Yamashita, K; Fujita, H; Toshiyoshi, H,期刊:Journal of Micromechanics and Microengineering, 页码:45005-45005 , 文章类型: Article,,卷期:2008年18-4]
- We present a micromechanical device designed to be used as a non-volatile mechanical memory. The structure is composed of a suspended slender nanowire (width: 100 nm, thickness: 430 nm, length: 8 to 30 mu m) clamped at b...
- A volumetric flow sensor for automotive injection systems - art. no. 045006
[作者:Schmid, U; Krotz, G; Schmitt-Landsiedel, D,期刊:Journal of Micromechanics and Microengineering, 页码:45006-45006 , 文章类型: Article,,卷期:2008年18-4]
- For further optimization of the automotive power train of diesel engines, advanced combustion processes require a highly flexible injection system, provided e. g. by the common rail (CR) injection technique. In the past,...
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