- Thermal simulation and design optimization of a thermopile infrared detector with an SU-8 membrane
[作者:Mattsson, CG; Bertilsson, K; Thungstrom, G; Nilsson, HE; Martin, H,期刊:Journal of Micromechanics and Microengineering, 页码:0-0 , 文章类型: Conference,,卷期:2009年19-5]
- Simulation and optimization tools are commonly used in the design phase of advanced electronics devices. In this work, we present a thermal simulation and design optimization tool for infrared thermopile detectors based ...
- Moving-part-free microfluidic systems for lab-on-a-chip
[作者:Luo, JK; Fu, YQ; Li, Y; Du, XY; Flewitt, AJ; Walton, AJ; Milne, WI,期刊:Journal of Micromechanics and Microengineering, 页码:0-0 , 文章类型: Conference,,卷期:2009年19-5]
- Microfluidic systems are part of an emerging technology which deals with minute amounts of liquids (biological samples and reagents) on a small scale. They are fast, compact and can be made into a highly integrated syste...
- Large-area laser nano-texturing with user-defined patterns
[作者:Li, L; Guo, W; Wang, ZB; Liu, Z; Whitehead, D; Luk'yanchuk, B,期刊:Journal of Micromechanics and Microengineering, 页码:0-0 , 文章类型: Conference,,卷期:2009年19-5]
- Writing nano-sized features less than the diffraction limit of the lasers efficiently over a large area requires special technology development. This paper reports the use of a self-assembled particle lens array with nea...
- Fabrication of micro/nano-structures using focused ion beam implantation and XeF2 gas-assisted etching
[作者:Xu, ZW; Fang, FZ; Fu, YQ; Zhang, SJ; Han, T; Li, JM,期刊:Journal of Micromechanics and Microengineering, 页码:0-0 , 文章类型: Conference,,卷期:2009年19-5]
- A micro/nano-structure fabrication method is developed using focused ion beam implantation (FIBI) and FIB XeF2 gas-assisted etching (FIB-GAE). Firstly, the FIB parameters' influence on the FIBI depth is studied by SEM ob...
- Ultra-precision machining of sinusoidal surfaces using the cylindrical coordinate method
[作者:Zhang, XD; Fang, FZ; Wang, HB; Wei, GS; Hu, XT,期刊:Journal of Micromechanics and Microengineering, 页码:0-0 , 文章类型: Conference,,卷期:2009年19-5]
- Micro-and ultra-precision machining is an effective approach to achieving a nanometric surface finish, which is important for the sinusoidal surface as the calibrator of multi-axis precision machines. A cylindrical coord...
- Microstructural characterization of an ultra-precision-machined surface of a Zn-Al alloy
[作者:To, S; Chan, CY; Zhang, SJ; Cheung, CF; Zhu, YH; Lee, WB,期刊:Journal of Micromechanics and Microengineering, 页码:0-0 , 文章类型: Conference,,卷期:2009年19-5]
- The surface of a furnace-cooled Zn-Al-based alloy was ultra-precision machined both with and without a coolant. The microstructure and phase decomposition of the ultra-precision-machined surface were studied using back-s...
- A semi-fixed abrasive machining technique
[作者:Yuan, JL; Wang, ZW; Hong, T; Deng, QF; Wen, DH; Lv, BH,期刊:Journal of Micromechanics and Microengineering, 页码:0-0 , 文章类型: Conference,,卷期:2009年19-5]
- This paper proposes the technique of semi-fixed abrasive machining to reduce or eliminate the surface defects caused by large abrasive grains and improve the efficiency of ultra-precision processing. The method of semi-f...
- Generation of metal-oxide nanoparticles using continuous-wave fibre laser ablation in liquid
[作者:Liu, Z; Yuan, Y; Khan, S; Abdolvand, A; Whitehead, D; Schmidt, M; Li, L,期刊:Journal of Micromechanics and Microengineering, 页码:0-0 , 文章类型: Conference,,卷期:2009年19-5]
- In recent years, laser ablation in liquid has become an increasingly important technique for the fabrication of nanoparticles (NPs). To date, only pulsed lasers have been used. This paper reports our recent studies on th...
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