- Development of SAW based gyroscope with high shock and thermal stability
[作者:Oh, H; Wang, W; Yang, S; Lee, K,期刊:Sensors And Actuators A-Physical, 页码:8-15 , 文章类型: Article,,卷期:2011年165-1]
- A novel surface acoustic wave (SAW)-based gyroscope with an 80 MHz central frequency was developed on a 128 degrees YX LiNbO3 piezoelectric substrate. The developed sensor was composed of a SAW resonator, metallic dots, ...
- Optimization and comparison of photonic crystal resonators for silicon microcantilever sensors
[作者:Trong, TM; Hsiao, FL; Lee, C; Xiang, WF; Chen, CC; Choi, WK,期刊:Sensors And Actuators A-Physical, 页码:16-25 , 文章类型: Article,,卷期:2011年165-1]
- Microcantilever sensors have been known as a fundamental design used in force sensors, strain sensors and biochemical sensors. The fast-growing applications in nanoelectromechanical systems (NEMS) lead to strong demands ...
- Buckling control of silicon dioxide diaphragms by lateral stress enhancement for sensitivity improvement of piezoelectric ultrasonic microsensors
[作者:Yamashita, K; Watanabe, T; Yoshizaki, T; Noda, M; Okuyama, M,期刊:Sensors And Actuators A-Physical, 页码:54-58 , 文章类型: Article,,卷期:2011年165-1]
- Piezoelectric ultrasonic microsensors have been fabricated using sol-gel derived PZT (Pb(Zr,Ti)O-3) thin films on micromachined silicon dioxide diaphragms which are made from a normal silicon wafer instead of the convent...
- Analysis of high-Q, gallium nitride nanowire resonators in response to deposited thin films
[作者:Montague, JR; Dalberth, M; Gray, JM; Seghete, D; Bertness, KA; George, SM; Bright, VM; Rogers, CT; Sanford, NA,期刊:Sensors And Actuators A-Physical, 页码:59-65 , 文章类型: Article,,卷期:2011年165-1]
- Gallium nitride nanowires (GaN-NWs) are systems of interest for mechanical resonance-based sensors due to their small mass and, in the case of c-axis NWs, high mechanical quality (Q) factors of 10,000-100,000. We report ...
- Integration of piezoelectric tunable capacitors and bonded-wire inductors for contactless RF switch and tunable filter
[作者:Chen, SJ; Lee, CY; Kim, ES,期刊:Sensors And Actuators A-Physical, 页码:73-78 , 文章类型: Article,,卷期:2011年165-1]
- This paper presents the design, fabrication, and characterization of a contactless radio frequency (RF) microelectromechanical system (MEMS) switch, composed of two surface-micromachined piezoelectric tunable capacitors ...
- Angular vertical comb actuators assembled on-chip using in-plane electrothermal actuators and latching mechanisms
[作者:Eun, Y; Na, H; Choi, J; Lee, JI; Kim, J,期刊:Sensors And Actuators A-Physical, 页码:94-100 , 文章类型: Article,,卷期:2011年165-1]
- We have designed, fabricated and tested self-aligned angular vertical comb-drive (AVC) actuators by on-chip assembly using in-plane electrothermal actuators and latching mechanisms. The on-chip assembly process is carrie...
- Atomic layer deposition enabled interconnect technology for vertical nanowire arrays
[作者:Cheng, JH; Seghete, D; Lee, M; Schlager, JB; Bertness, KA; Sanford, NA; Yang, RG; George, SM; Lee, YC,期刊:Sensors And Actuators A-Physical, 页码:107-114 , 文章类型: Article,,卷期:2011年165-1]
- We have demonstrated an atomic layer deposition (ALD) enabled interconnect technology for vertical, c-axis oriented gallium nitride (GaN) nanowire (NW, 5-10 mu m in length, 80-200 nm in diameter) arrays encapsulated by b...
- Realistic imitation of mosquito's proboscis: Electrochemically etched sharp and jagged needles and their cooperative inserting motion
[作者:Izumi, H; Suzuki, M; Aoyagi, S; Kanzaki, T,期刊:Sensors And Actuators A-Physical, 页码:115-123 , 文章类型: Article,,卷期:2011年165-1]
- Aiming at the use in low-invasive medical treatments, this paper proposes a realistic imitation of mosquito's proboscis. A silicon needle is electrochemically etched, making the three-dimensionally sharp tip with finely ...
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