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文章名     作者     期刊名     摘要     卷     期         如果没有找到您所需要的文献，请点击 ——此处申请     共17条记录   An axial strain modulated double-ended tuning fork electrometer [作者：Lee, JEY; Bahreyni, B; Seshia, AA,期刊：Sensors And Actuators A-Physical, 页码：395-400 , 文章类型： Article，,卷期：2008年148-2] This paper reports a micromechanical electrometer that uses a single-crystal silicon double-ended tuning fork resonator as the charge sensing element. Addition of a charge across an input capacitor induces a tensile axia... Low-noise real-time measurement of the position of movable structures in MEMS [作者：Langfelder, G; Longoni, A; Zaraga, F,期刊：Sensors And Actuators A-Physical, 页码：401-406 , 文章类型： Article，,卷期：2008年148-2] A low-noise, low-perturbing electrostatic position measurement system for capacitive MEMS sensors is described.Asmall-amplitude, high-frequency voltage signal is applied between the movable and fixed plates of the sensin... Deformation characteristics of electroplated MEMS cantilever beams released by plasma ashing [作者：Kang, TJ; Kim, JG; Kim, JH; Hwang, KC; Lee, BW; Baek, CW; Kim, YK; Kwon, D; Lee, HY; Kim, YH,期刊：Sensors And Actuators A-Physical, 页码：407-415 , 文章类型： Article，,卷期：2008年148-2] The present study quantitatively examines the deformation characteristics of electroplated MEMS structures released by plasma ashing. This study investigates the thermal deformations clue to the high temperature of ambie... Microhotplates with TiN heaters [作者：Creemer, JF; Briand, D; Zandbergen, HW; van der Vlist, W; de Boer, CR; de Rooij, NF; Sarro, PM,期刊：Sensors And Actuators A-Physical, 页码：416-421 , 文章类型： Article，,卷期：2008年148-2] Titanium nitride (TiN) has been investigated as a heater material for microhotplates and microreactors. TiN is available in many CMOS processes, unlike many other microheater materials. In addition, TiN has a very high m... Large angle SOI tilting actuator with integrated motion transformer and amplifier [作者：Ya'akobovitz, A; Krylov, S; Shacham-Diamand, Y,期刊：Sensors And Actuators A-Physical, 页码：422-436 , 文章类型： Article，,卷期：2008年148-2] In this work we report on the novel architecture and operational principle of a tilting actuator with integrated motion transformer and amplifier fabricated using single structural layer of silicon on insulator (SOI) waf... Development of a NiTi actuator using a two-way shape memory effect induced by compressive loading cycles [作者：Kim, HC; Yoo, YI; Lee, JJ,期刊：Sensors And Actuators A-Physical, 页码：437-442 , 文章类型： Article，,卷期：2008年148-2] NiTi can produce a large force per unit volume and operate with a simple mechanism. For these reasons, it has been widely researched for application as an actuator In this study, preliminary research to develop a NiTi li... Robust generalised impedance control of piezo-actuated flexure-based four-bar mechanisms for micro/nano manipulation [作者：Liaw, HC; Shirinzadeh, B,期刊：Sensors And Actuators A-Physical, 页码：443-453 , 文章类型： Article，,卷期：2008年148-2] This paper presents a novel robust generalised impedance control methodology for piezo-actuated flexure-based four-bar micro/nano manipulation mechanisms. This control approach is proposed for compliant manipulation in w... Fabrication of LCD color filter using laser-induced thermal spray printing [作者：Lee, JH; Na, SJ; Yoo, CD; Kim, YS,期刊：Sensors And Actuators A-Physical, 页码：454-461 , 文章类型： Article，,卷期：2008年148-2] The color filter of the LCD panel is fabricated using the laser induced thermal spray printing (LITSP) method, which ejects the ink droplets from the blind-holes of the donor plate to the substrate by the bubble pressure... Online methods to measure breaking force of bonding wire using a CMOS stress sensor and a proximity sensor [作者：Shah, A; Lee, J; Mayer, M; Zhou, YN,期刊：Sensors And Actuators A-Physical, 页码：462-471 , 文章类型： Article，,卷期：2008年148-2] Two real-time, in situ methods to measure the breaking force of fine bonding wires while on the wire bonder are reported and compared. The first method uses a special test chip with a piezoresistive microsensor integrate... Using electric actuation and detection of oscillations in microcantilevers for pressure measurements (vol 147, pg 203, 2008) [作者：Keskar, G; Elliott, B; Gaillard, J; Skove, MJ; Rao, AM,期刊：Sensors And Actuators A-Physical, 页码：472-472 , 文章类型： Correction，,卷期：2008年148-2] Editorial message for the special issue on selected papers from Transducers'07 & Eurosensors XXI (vol 1, pg 145, 2008) [作者：Puers, R; Delapierre, G,期刊：Sensors And Actuators A-Physical, 页码：473-473 , 文章类型： Correction，,卷期：2008年148-2] Reflective type segmented electrooptical electric field sensor [作者：Lee, HY; Lee, TH; Shay, WT; Lee, CT,期刊：Sensors And Actuators A-Physical, 页码：355-358 , 文章类型： Article，,卷期：2008年148-2] An electric field sensor was integrated by combining reflective type LiNbO3 Mach-Zehnder modulator and segmented modulator electrode. The frequency response is flat from 750 MHz to 6 GHz. The average minimum detectable e... Design, fabrication, and characterization of single-element interdigital transducers for NDT applications [作者：Na, JK; Blackshire, JL; Kuhr, S,期刊：Sensors And Actuators A-Physical, 页码：359-365 , 文章类型： Article，,卷期：2008年148-2] Single-element interdigital transducers (IDTs) are designed, fabricated, and characterized as a complimentary sensor approach for traditional ultrasonic transducers used in nondestructive testing (NDT). The frequency of ... Development of an Electrical Capacitance Tomography system using four rotating electrodes [作者：Olmos, AM; Carvajal, MA; Morales, DP; Garcia, A; Palma, AJ,期刊：Sensors And Actuators A-Physical, 页码：366-375 , 文章类型： Article，,卷期：2008年148-2] This paper presents an Electrical Capacitance Tomography (ECT) sensor scheme consisting of N segments linked in four groups, treated as single, extremely broad electrodes forming a 4-electrode sensor. This configuration ... Stabilization of optical Fabry-Perot sensor by active feedback control of diode laser [作者：Chen, JY; Chen, DJ; Geng, JX; Li, J; Cai, HW; Fang, ZJ,期刊：Sensors And Actuators A-Physical, 页码：376-380 , 文章类型： Article，,卷期：2008年148-2] This paper presents the design and characterization of a fiber Fabry-Perot interferometer (FFPI) acoustic wave detector with its Q point being stabilized actively. The relationship between the reflectivity of the F-P cav... Development and testing of a micro-thruster impulse characterization system utilizing pendulum swing time measurements [作者：Kang, SJ; Cho, HR; Chang, YK,期刊：Sensors And Actuators A-Physical, 页码：381-387 , 文章类型： Article，,卷期：2008年148-2] A new method for measuring the performance of a micro-thruster is suggested in this paper. A few thrust stands have been developed for measuring micro-level thrusts. This paper describes a different measurement method th...