- Nanoperforated silicon membranes fabricated by UV-nanoimprint lithography, deep reactive ion etching and atomic layer deposition
[作者:Sainiemi, L; Viheriala, J; Sikanen, T; Laukkanen, J; Niemi, T,期刊:Journal of Micromechanics and Microengineering, 页码:77001-77001 , 文章类型: Article,,卷期:2010年20-7]
- We present a fabrication process for free-standing, nanoperforated membranes made of single-crystalline silicon and study the membranes' capability to separate different sized nanobeads from liquid suspension. The fabric...
- High quality shadow masks for top contact organic field effect transistors using deep reactive ion etching
[作者:Aljada, M; Mutkins, K; Vamvounis, G; Burn, P; Meredith, P,期刊:Journal of Micromechanics and Microengineering, 页码:75037-75037 , 文章类型: Article,,卷期:2010年20-7]
- In this paper, we demonstrate the fabrication of top-contact silicon shadow masks for organic field effect transistors (OFETs) using plasma deep reactive ion etching (DRIE). Over 50 parallel and interdigitated finger con...
- The effect of pitch on deformation behavior and the stretching-induced failure of a polymer-encapsulated stretchable circuit
[作者:Hsu, YY; Gonzalez, M; Bossuyt, F; Axisa, F; Vanfleteren, J; DeWolf, I,期刊:Journal of Micromechanics and Microengineering, 页码:75036-75036 , 文章类型: Article,,卷期:2010年20-7]
- The deformation behavior and failure mechanisms of parallel-aligned, horseshoe-patterned, stretchable conductors encapsulated in a polymer substrate were investigated by numerical and experimental analyses. A design guid...
- Research on reference vibration for a two-axis piezoelectric micro-machined gyroscope
[作者:Lu, Y; Wu, XS; Zhang, WP; Chen, WY; Cui, F; Liu, W,期刊:Journal of Micromechanics and Microengineering, 页码:75039-75039 , 文章类型: Article,,卷期:2010年20-7]
- This paper presents a new method for vibratory gyroscopes. A novel special vibration is presented, and when it is taken as a reference vibration, the device can sense two-axis angular velocity. It has a simple structure ...
- Fabrication of an organic field effect transistor using nano imprinting of Ag inks and semiconducting polymers
[作者:Hu, PA; Li, K; Chen, WL; Peng, L; Chu, DP; O'Neill, W,期刊:Journal of Micromechanics and Microengineering, 页码:75032-75032 , 文章类型: Article,,卷期:2010年20-7]
- A simple and cheap procedure for flexible electronics fabrication was demonstrated by imprinting metallic nanoparticles (NPs) on flexible substrates. Silver NPs with an average diameter of 10 nm were prepared via an impr...
- X-ray fabrication of SAW resonators with narrow electrodes in thick high-aspect-ratio polymer templates
[作者:Klymyshyn, DM; Mappes, T; Achenbach, S; Kachayev, A; Borner, M; Mohr, J,期刊:Journal of Micromechanics and Microengineering, 页码:75031-75031 , 文章类型: Article,,卷期:2010年20-7]
- X-ray lithography shadow projection using silicon nitride-based x-ray masks is used to fabricate sub-micron scale, high-aspect-ratio structures in thick polymer templates for surface acoustic wave (SAW) applications. Int...
- Black silicon method XI: oxygen pulses in SF6 plasma
[作者:Jansen, HV; de Boer, MJ; Ma, K; Girones, M; Unnikrishnan, S; Louwerse, MC; Elwenspoek, MC,期刊:Journal of Micromechanics and Microengineering, 页码:75027-75027 , 文章类型: Article,,卷期:2010年20-7]
- A detailed study is performed to understand and show the potential of high-speed, deep reactive ion etching (DRIE) of silicon using oxygen inhibitor pulses as a replacement for hydro-fluorocarbons (HFCs). This process mi...
- Wetting characteristics on hierarchical structures patterned by a femtosecond laser
[作者:Zhang, DS; Chen, F; Fang, GP; Yang, Q; Xie, DG; Qiao, GJ; Li, W; Si, JH; Hou, X,期刊:Journal of Micromechanics and Microengineering, 页码:75029-75029 , 文章类型: Article,,卷期:2010年20-7]
- Micro-scale hierarchical structures consisting of parallel grooves decorated by embossed triangle patterns are prepared by femtosecond laser irradiation on silicon (Si) wafers. The effects of surface morphology on wettin...
- Low-cost and high-resolution x-ray lithography utilizing a lift-off sputtered lead film mask on a Mylar substrate
[作者:Wisitsoraat, A; Mongpraneet, S; Phatthanakun, R; Chomnawang, N; Phokharatkul, D; Patthanasettakul, V; Tuantranont, A,期刊:Journal of Micromechanics and Microengineering, 页码:75026-75026 , 文章类型: Article,,卷期:2010年20-7]
- In this work, a low-cost and high-resolution x-ray micromask is developed by sputtered lead film on a Mylar sheet substrate with the lift-off process and the x-ray mask is experimented for patterning SU-8 negative photor...
- Transparent conductive-polymer strain sensors for touch input sheets of flexible displays
[作者:Takamatsu, S; Takahata, T; Muraki, M; Iwase, E; Matsumoto, K; Shimoyama, I,期刊:Journal of Micromechanics and Microengineering, 页码:75017-75017 , 文章类型: Article,,卷期:2010年20-7]
- A transparent conductive polymer-based strain-sensor array, designed especially for touch input sheets of flexible displays, was developed. A transparent conductive polymer, namely poly(3, 4-ethylenedioxythiophene):polys...
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