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  • Plasma-Enhanced Atomic Layer Deposition of Silver Thin Films
    [作者:Kariniemi, M; Niinisto, J; Hatanpaa, T; Kemell, M; Sajavaara, T; Ritala, M; Leskela, M,期刊:CHEMISTRY OF MATERIALS, 页码:2901-2907 , 文章类型: Article,,卷期:2011年23-11]
  • Thermal properties of various silver precursors known in the literature were evaluated in order to discover which precursor is the most suitable one for plasma-enhanced atomic layer deposition (PEALD) of silver thin film...
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