- Soft microgripping using ionic liquids for high temperature and vacuum applications - art. no. 125025
[作者:Al Amin, A; Jagtiani, A; Vasudev, A; Hu, J; Zhe, J,期刊:Journal of Micromechanics and Microengineering, 页码:25025-25025 , 文章类型: Article,,卷期:2011年21-12]
- Aqueous droplet-based micro-gripper has been used for micro-assembly. However they cannot be used for high temperature and vacuum applications. Ionic liquids, organic salts that have a lower melting point temperature, ap...
- Study on dielectric charging in low-stress silicon nitride with the MIS structure for reliable MEMS applications - art. no. 125019
[作者:San, HS; Deng, ZQ; Yu, YX; Li, G; Chen, XY,期刊:Journal of Micromechanics and Microengineering, 页码:25019-25019 , 文章类型: Article,,卷期:2011年21-12]
- Charge-induced failure has been recognized as a primary reliability issue in capacitive micro-actuators. In this paper, we present a simple method to assess the effect of dielectric charging on reliability of a capacitiv...
- Porous inorganic-organic hybrid material by oxygen plasma treatment - art. no. 125003
[作者:Aura, S; Jokinen, V; Laitinen, M; Sajavaara, T; Franssila, S,期刊:Journal of Micromechanics and Microengineering, 页码:25003-25003 , 文章类型: Article,,卷期:2011年21-12]
- In this paper, we present the pore formation on inorganic-organic hybrid material, ORMOCER (c), by reactive ion etching. ORMOCERs are composed of inorganic backbone where organic side groups are attached by cross-linking...
- Reliability assessment of the complete 3D etch rate distribution of Si in anisotropic etchants based on vertically micromachined wagon wheel samples - art. no. 125008
[作者:Gosalvez, MA; Pal, P; Ferrando, N; Sato, K,期刊:Journal of Micromechanics and Microengineering, 页码:25008-25008 , 文章类型: Article,,卷期:2011年21-12]
- As a sequel to part I (Gosalvez et al J. Micromech. Microeng. 12 125007), the present paper is part II of a series of two papers dedicated to the presentation of a novel, large-throughput, experimental procedure to deter...
- Pulsed light sintering characteristics of inkjet-printed nanosilver films on a polymer substrate - art. no. 125023
[作者:Lee, DJ; Park, SH; Jang, S; Kim, HS; Oh, JH; Song, YW,期刊:Journal of Micromechanics and Microengineering, 页码:25023-25023 , 文章类型: Article,,卷期:2011年21-12]
- In this work, the microstructures of inkjet-printed nanosilver films sintered by intense pulsed light (IPL) were systematically analyzed and correlated with the electrical properties. Nanosilver films with various dimens...
- MEMS-tunable composite right/left-handed (CRLH) transmission line and its application to a phase shifter - art. no. 125022
[作者:Hwang, SH; Jang, T; Kim, JM; Kim, YK; Lim, S; Baek, CW,期刊:Journal of Micromechanics and Microengineering, 页码:25022-25022 , 文章类型: Article,,卷期:2011年21-12]
- This paper reports a novel compact tunable composite right/left-handed transmission line (CRLH TL) with multi-state phase tunability using integrated microelectromechanical system (MEMS) switches and its application to a...
- Micro-cantilever integrated 2D photonic crystal slab waveguide for enhanced dispersion tuning - art. no. 125010
[作者:Abdulla, SMC; Kauppinen, LJ; Dijkstra, M; de Boer, MJ; Berenschot, E; de Ridder, RM; Krijnen, GJM,期刊:Journal of Micromechanics and Microengineering, 页码:25010-25010 , 文章类型: Article,,卷期:2011年21-12]
- This paper presents the fabrication technology for a novel class of photonic devices which integrates silicon 2D photonic crystal (PhC) waveguides and electrostatically actuated microelectromechanical systems. Bimorph ca...
- Nano-cluster-enhanced high-performance perfluoro-polymer electrets for energy harvesting - art. no. 125016
[作者:Kashiwagi, K; Okano, K; Miyajima, T; Sera, Y; Tanabe, N; Morizawa, Y; Suzuki, Y,期刊:Journal of Micromechanics and Microengineering, 页码:25016-25016 , 文章类型: Article,,卷期:2011年21-12]
- Development of high-performance electret materials is required to obtain a large power output of the electrostatic vibration-driven energy harvesters. In this study, by introducing aminosilane derivatives into CYTOP-base...
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