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文章名     作者     期刊名     摘要     卷     期         如果没有找到您所需要的文献，请点击 ——此处申请     共18条记录   Far-infrared sensor with LPCVD-deposited low-stress Si-rich nitride absorber membrane-Part 1. Optical absorptivity [作者：Jutzi, F; Wicaksono, DHB; Pandraud, G; de Rooij, N; French, PJ,期刊：Sensors And Actuators A-Physical, 页码：119-125 , 文章类型： Article，,卷期：2009年152-2] This is the first part of the two articles reporting investigation of a thermal detector-type far-infrared sensor operating in the 8-14 mu m wavelength, using Low-Pressure-Chemical-Vapor-Deposition (LPCVD)deposited low-s... Far-infrared sensor with LPCVD-deposited low-stress Si-rich nitride absorber membrane Part 2: Thermal property, and sensitivity [作者：Jutzi, F; Wicaksono, DHB; Pandraud, G; de Rooij, N; French, PJ,期刊：Sensors And Actuators A-Physical, 页码：126-138 , 文章类型： Article，,卷期：2009年152-2] This is the second part of two articles reporting investigation on a thermal-detector-type far-infrared sensor operating in the 8-14 mu m wavelength region using Low-Pressure Chemical Vapor Deposition (LPCVD) deposited l... Triaxial fluxgate sensor with electroplated core [作者：Kubik, J; Vcelak, J; O'Donnell, T; McCloskey, P,期刊：Sensors And Actuators A-Physical, 页码：139-145 , 文章类型： Article，,卷期：2009年152-2] A novel fluxgate sensor with a single ferromagnetic core capable of measurement in three principal axes is presented. The sensor manufacturing process and internal coil structure is explained and its excitation is modell... Low cost capillary flow meter [作者：Topolnicki, J; Kudasik, M; Skoczylas, N; Sobczyk, J,期刊：Sensors And Actuators A-Physical, 页码：146-150 , 文章类型： Article，,卷期：2009年152-2] This article introduces a project and some specifications of the capillary flow meter. The functioning of the presented flow meter is based on the measurement of pressure drop caused by the gas flowing through the capill... Silicon microcantilever hotplates with high temperature uniformity [作者：Privorotskaya, NL; King, WP,期刊：Sensors And Actuators A-Physical, 页码：160-167 , 文章类型： Article，,卷期：2009年152-2] This paper presents microcantilevers with integrated heater-thermometers that are engineered to have regions of highly uniform temperature. The cantilevers are fabricated from doped single crystal silicon. Four cantileve... Mechanism of pressure recovery in jet-type actuators [作者：Tesar, V,期刊：Sensors And Actuators A-Physical, 页码：182-191 , 文章类型： Article，,卷期：2009年152-2] Jet-type actuators generating synthetic jets became recently very important for control of flow past bodies. In contrast to mechanical pulsators usually used in them, a number of advantages especially for the hybrid-synt... Thermal cycle modeling of electrothermal microactuators [作者：Mayyas, M; Shiakolas, PS; Lee, WH; Stephanou, H,期刊：Sensors And Actuators A-Physical, 页码：192-202 , 文章类型： Article，,卷期：2009年152-2] A methodology for computing the transient heating (charging) and cooling (discharging) time for a serially connected electro thermo (E-T) microbeams actuator were analytically approximated from fundamental characteristic... Optoelectronic joint angular sensor for robotic fingers [作者：Cavallo, A; De Maria, G; Natale, C; Pirozzi, S,期刊：Sensors And Actuators A-Physical, 页码：203-210 , 文章类型： Article，,卷期：2009年152-2] The present paper reports the results of the development of a novel joint angular sensor conceived for integration in tendon-driven robotic hands and in data gloves used in virtual reality systems. The sensor is based on... Development of liquid pumping devices using vibrating microchannel walls [作者：Ogawa, J; Kanno, I; Kotera, H; Wasa, K; Suzuki, T,期刊：Sensors And Actuators A-Physical, 页码：211-218 , 文章类型： Article，,卷期：2009年152-2] In this paper, we propose innovative valveless pumping devices for microfluidic systems. The liquid in the microchannel was transported by generating a traveling wave on the channel wall, which was composed of a piezoele... Piezoelectric ultrasonic micro/milli-scale actuators [作者：Watson, B; Friend, J; Yeo, L,期刊：Sensors And Actuators A-Physical, 页码：219-233 , 文章类型： Article，,卷期：2009年152-2] A growing demand for actuators with a volume of less than 1 mm(3) has driven researchers to produce a varied range of micro/milli-scale designs. By examining the underlying physics of the actuator operation we are able t... Development of a hybrid ferrofluid seal technology for miniature pneumatic and hydraulic actuators [作者：De Volder, M; Reynaerts, D,期刊：Sensors And Actuators A-Physical, 页码：234-240 , 文章类型： Article，,卷期：2009年152-2] Future microrobotic applications require actuators that can generate a high actuation force and stroke in a limited volume. Up to now, little research has been performed on the development of pneumatic and hydraulic micr... Intelligent sensor for tracking and monitoring of blood temperature and hemoderivatives used for transfusions [作者：Abarca, A; de la Fuente, M; Abril, JM; Garcia, A; Perez-Ocon, F,期刊：Sensors And Actuators A-Physical, 页码：241-247 , 文章类型： Article，,卷期：2009年152-2] The present work describes the design and manufacture of a prototype (currently in use) of an intelligent sensor for the tracking and monitoring of blood temperature and of hemoderivatives to be used in transfusions, ove... Detection of biomolecular surface interactions by transit time measurements with a coplanar transmission line probe [作者：Chen, Q; Roitman, D; Knoesen, A,期刊：Sensors And Actuators A-Physical, 页码：151-159 , 文章类型： Article，,卷期：2009年152-2] Changes in the transit time of a short electrical pulse propagating through a coplanar transmission line (CTL) are used to sense protein interactions at an aqueous-solid interface. The effective permittivity of the CTL i... Line laser beam based laser-induced fluorescence detection system for microfluidic chip electrophoresis analysis [作者：Xu, BJ; Yang, M; Wang, H; Zhang, HL; Jin, QH; Zhao, JL; Wang, HM,期刊：Sensors And Actuators A-Physical, 页码：168-175 , 文章类型： Article，,卷期：2009年152-2] In this work, a new laser-induced fluorescence (LIF) detection system based on a line laser beam for microfluidic chip electrophoresis analysis was developed. This detection system had the advantages of simple optical st... Design and analysis of a highly stabilised optical fiber Michelson interferometer measurement system [作者：Xie, F; Ren, JY; Chen, ZM,期刊：Sensors And Actuators A-Physical, 页码：176-181 , 文章类型： Article，,卷期：2009年152-2] Single-mode optical fiber interferometers used with measurement or sensing systems should be stabilised to achieve high measurement accuracy and linearity in the presence of differential phase drift in their arms resulti... Liquid-level monitoring sensor systems using fiber Bragg grating embedded in cantilever [作者：Sohn, KR; Shim, JH,期刊：Sensors And Actuators A-Physical, 页码：248-251 , 文章类型： Article，,卷期：2009年152-2] A fiber-optic liquid-level sensor based on the bending of a fiber Bragg grating (FBG) is proposed. The FBG embedded in a cantilever rod such that the elongation and contraction of the Bragg grating indicate a liquid-leve...