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文章名     作者     期刊名     摘要     卷     期         如果没有找到您所需要的文献，请点击 ——此处申请     共25条记录   Three-dimensionally combined carbonized polymer sensor and heater [作者：Jeong, OC; Konishi, S,期刊：Sensors And Actuators A-Physical, 页码：97-105 , 文章类型： Article，,卷期：2008年143-1] This paper presents for the first time fabrication process of a three-dimensionally combined carbonized NO2 sensor and the microresistive heater for the future integration of the nitrogen dioxide gas detection system. Th... Micro-energy storage system using permanent magnet and high-temperature superconductor [作者：Lee, K; Yi, JE; Kim, B; Ko, J; Jeong, S; Noh, M; Lee, SS,期刊：Sensors And Actuators A-Physical, 页码：106-112 , 文章类型： Article，,卷期：2008年143-1] This paper presents the design and experiment with a micro-energy storage system using an axial-flux permanent magnet and a high-temperature superconductor (HTS). This system consists of a three-phase planar stator, flyw... Micro-impedance inclinometer with wide-angle measuring capability and no damping effect [作者：Lin, CH; Kuo, SM,期刊：Sensors And Actuators A-Physical, 页码：113-119 , 文章类型： Article，,卷期：2008年143-1] This paper reports a high-performance impedance-type inclinometer fabricated in a glass-SU-8-glass sandwich structure for wide-angle measurements with rapid sensing response. The output signal of the proposed-inclinomete... AlCuMgMn micro-tensile samples - Mechanical characterization of MEMS materials at micro-scale [作者：Modlinski, R; Puers, R; De Wolf, I,期刊：Sensors And Actuators A-Physical, 页码：120-128 , 文章类型： Article，,卷期：2008年143-1] Measuring mechanical properties at the micro-scale is essential to understand and fabricate reliable MEMS. In this paper we present a tensile testing system and test samples on the micro-scale. The test samples have a do... Reconfigurable liquid micro-lenses with high positioning accuracy [作者：Krogmann, F; Shaik, R; Lasinger, L; Monch, W; Zappe, H,期刊：Sensors And Actuators A-Physical, 页码：129-135 , 文章类型： Article，,卷期：2008年143-1] A new technique to improve the positioning accuracy of liquid droplets in electrowetting-on-dielectric applications is presented. The approach is based on a structured dielectric layer providing defined pinning barriers ... Mechanical calibration of MEMS springs with sub-micro-Newton force resolution [作者：Miyamoto, K; Jornori, T; Sugano, K; Tabata, O; Tsuchiya, T,期刊：Sensors And Actuators A-Physical, 页码：136-142 , 文章类型： Article，,卷期：2008年143-1] Direct stiffness calibration of microelectromechanical-system (MEMS) springs made of single-crystal silicon was performed using a previously developed mechanical force measurement tool. The spring devices used for calibr... An integrated flexible temperature and tactile sensing array using PI-copper films [作者：Yang, Y; Cheng, MY; Chang, WY; Tsao, LC; Yang, SA; Shih, WP; Chang, EY; Chang, SH; Fan, KC,期刊：Sensors And Actuators A-Physical, 页码：143-153 , 文章类型： Article，,卷期：2008年143-1] This paper presents the design, fabrication and measurement of a flexible 8 x 8 temperature and tactile sensing array which will be used as the artificial skin for robot applications. The temperature and tactile sensing ... On the wet etching of Pyrex glass [作者：Iliescu, C; Chen, B; Miao, J,期刊：Sensors And Actuators A-Physical, 页码：154-161 , 文章类型： Article，,卷期：2008年143-1] This paper addresses a commonly raised question regarding wet etching of Pyrex glass: "How are the defects on the glass generated during etching process while most of the masking materials are chemically inert in the etc... Monolithic 1-chip FBAR duplexer for W-CDMA handsets [作者：Nam, K; Park, Y; Ha, B; Kim, C; Shin, J; Yun, S; Pak, J; Park, G; Song, I,期刊：Sensors And Actuators A-Physical, 页码：162-168 , 文章类型： Article，,卷期：2008年143-1] Film bulk acoustic resonator (FBAR) filters and duplexers are receiving increasing attentions in RF systems due to the advantages of having high power handling capability, high Q-factors, good thermal stability, require ... A novel intelligent textile technology based on silicon flexible skins [作者：Katragadda, RB; Xu, Y,期刊：Sensors And Actuators A-Physical, 页码：169-174 , 文章类型： Article，,卷期：2008年143-1] This paper reports the successful prototype development of a novel intelligent textile technology based on the integration of silicon flexible skins with regular textiles. This novel approach enables the embedding of sen... Glass-blown spherical microcells for chip-scale atomic devices [作者：Eklund, EJ; Shkel, AM; Knappe, SA; Donley, E; Kitching, J,期刊：Sensors And Actuators A-Physical, 页码：175-180 , 文章类型： Article，,卷期：2008年143-1] This paper demonstrates spherical vapor cells intended to be used in chip-scale atomic devices. A micro glass blowing process is introduced, in which multiple glass spheres are simultaneously shaped on the top of a silic... Miniaturized thermal flow sensor with planar-integrated sensor structures on semicircular surface channels [作者：Dijkstra, M; de Boer, MJ; Berenschot, JW; Lammerink, TSJ; Wiegerink, RJ; Elwenspoek, M,期刊：Sensors And Actuators A-Physical, 页码：1-6 , 文章类型： Article，,卷期：2008年143-1] A calorimetric miniaturized flow sensor was realized with a linear sensor response measured for water flow up to flow rates in the order of 300 nl min(-1). A versatile technological concept is used to realize a sensor wi... Modular microfluidic interconnects using photodefinable silicone microgaskets and MEMS O-rings [作者：Miserendino, S; Tai, YC,期刊：Sensors And Actuators A-Physical, 页码：7-13 , 文章类型： Article，,卷期：2008年143-1] Fully-integrated microgaskets and MEMS o-rings made of SU8 and photosensitive silicone are described and tested under varying conditions of compressive stress. An analytical theory of microgasket sealing behavior is also... Pulsation sensor integrated with microvascular holding actuator for thrombosis monitoring [作者：Mineta, T; Kida, N; Nomura, S; Makino, E; Sugawara, T; Toh, S; Shibata, T,期刊：Sensors And Actuators A-Physical, 页码：14-19 , 文章类型： Article，,卷期：2008年143-1] In this paper, we describe a micro-pulsation sensor, which is integrated with a TiNiCu ternary shape memory alloy (SMA) thin film actuator arm for microvascular holding. The actuator arm has micro-heaters to heat up the ... Biodegradable polymer needle with various tip angles and consideration on insertion mechanism of mosquito's proboscis [作者：Aoyagi, S; Izumi, H; Fukuda, M,期刊：Sensors And Actuators A-Physical, 页码：20-28 , 文章类型： Article，,卷期：2008年143-1] The present paper proposes a fabrication method of microneedles with various tip angles made of biodegradable polymer (polylactic acid, referred to herein as PLA). It was confirmed by the finite element method (FEM) simu... Vertically moving micromirror for detectors in the mid infrared [作者：Quack, N; Blunier, S; Dual, J; Arnold, M; Felder, F; Ebneter, C; Rahim, M; Zogg, H,期刊：Sensors And Actuators A-Physical, 页码：29-33 , 文章类型： Article，,卷期：2008年143-1] This paper presents continuative results on the design, fabrication and measurements of a vertically moving, electrostatically actuated micromirror, first shown at the IEEE MEMS 2007 [N. Quack, I. Zust, S. Blunier, J. Du...