- Fabrication of piezoelectric microcantilevers using LaNiO3 buffered Pb(Zr,Ti)O-3 thin film - art. no. 035007
[作者:Kobayashi, T; Ichiki, M; Kondou, R; Nakamura, K; Maeda, R,期刊:Journal of Micromechanics and Microengineering, 页码:35007-35007 , 文章类型: Article,,卷期:2008年18-3]
- We have fabricated piezoelectric microcantilevers using LaNiO3 (LNO) buffered Pb(Zr-0.52, Ti-0.48)O-3 (PZT) thin films through the microelectromechanical system (MEMS) microfabrication process. It has been found that the...
- Carving fiber-top cantilevers with femtosecond laser micromachining - art. no. 035005
[作者:Said, AA; Dugan, M; de Man, S; Iannuzzi, D,期刊:Journal of Micromechanics and Microengineering, 页码:35005-35005 , 文章类型: Article,,卷期:2008年18-3]
- We present a new fabrication method to carve fiber-top cantilevers from single-mode optical fibers. The procedure, which is entirely based on a two-step femtosecond laser micromachining technique, is faster and more conv...
- Microchannel fabrication in silica glass by femtosecond laser pulses with different central wavelengths - art. no. 035039
[作者:Sun, Q; Saliminia, A; Theberge, F; Vallee, R; Chin, SL,期刊:Journal of Micromechanics and Microengineering, 页码:35039-35039 , 文章类型: Article,,卷期:2008年18-3]
- A newly developed tunable visible femtosecond laser source was used to fabricate microchannels in silica glass. For comparison, femtosecond laser pulses from a Ti-sapphire laser at 800 nm as well as from a femtosecond op...
- Wafer-level flame-spray-pyrolysis deposition of gas-sensitive layers on microsensors - art. no. 035040
[作者:Kuhhe, S; Graf, M; Tricoli, A; Mayer, F; Pratsinis, SE; Hierlemann, A,期刊:Journal of Micromechanics and Microengineering, 页码:35040-35040 , 文章类型: Article,,卷期:2008年18-3]
- This paper presents a CMOS-compatible wafer-level fabrication process for monolithic CMOS/MEMS sensor systems coated with sensitive layers directly deposited by means of flame spray pyrolysis (FSP). Microhotplate (mu HP)...
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