- Microelectromechanical system-based vacuum gauge for measuring pressure and outgassing rates in miniaturized vacuum microelectronic devices - art. no. 02B114
[作者:Kuljic, R; Chang, J; Jayapratha, N; Dankovic, T; Banerjee, K; Feinerman, A; Busta, H,期刊:Journal Of Vacuum Science & Technology B, 页码:B2114-B2114 , 文章类型: Article,,卷期:2011年29-2]
- Cr/Au meander-shaped resistors were fabricated on 0.2 mu m thick square-shaped silicon nitride diaphragms with diaphragm dimensions ranging from 0.775 to 2.275 mm. The performance of these sensors was measured in a vacuu...
- Nanosecond pulsed field emission from single-gate metallic field emitter arrays fabricated by molding - art. no. 02B117
[作者:Tsujino, S; Paraliev, M; Kirk, E; Vogel, T; Le Pimpec, F; Gough, C; Ivkovic, S; Braun, HH,期刊:Journal Of Vacuum Science & Technology B, 页码:B2117-B2117 , 文章类型: Article,,卷期:2011年29-2]
- Electrically gated pulsed field emission from molybdenum field emitter arrays was studied. Single-gate field emitter array devices supported by metallic substrates were fabricated by a combination of molding and a self-a...
- Low temperature processing of indium-tin-zinc oxide channel layers in fabricating thin-film transistors - art. no. 021008
[作者:Lee, KC; Jo, KM; Sung, SY; Lee, JH; Kim, JJ; Jeong, BS; Pearton, SJ; Norton, DP; Heo, YW,期刊:Journal Of Vacuum Science & Technology B, 页码:21008-21008 , 文章类型: Article,,卷期:2011年29-2]
- The authors report on the fabrication of thin-film transistors (TFTs) using indium-tin-zinc oxides (ITZOs) as active channel layers. Transparent amorphous ITZO semiconductors were deposited at room temperature by rf-magn...
- Radial compression studies of WS2 nanotubes in the elastic regime - art. no. 021009
[作者:Kalfon-Cohen, E; Goldbart, O; Schreiber, R; Cohen, SR; Barlam, D; Lorenz, T; Enyashin, A; Seifert, G,期刊:Journal Of Vacuum Science & Technology B, 页码:21009-21009 , 文章类型: Article,,卷期:2011年29-2]
- Multiwalled nanotubes and nanoparticles of metal dichalcogenides express unique mechanical and tribological characteristics. A widely studied member of this class of materials is the WS2 nanotube whose structure consists...
- Effect of ultraviolet light irradiation on electron field emission from titanium-oxide nanostructures - art. no. 02B110
[作者:Wakaya, F; Tatsumi, T; Murakami, K; Abo, S; Takai, M; Takimoto, T; Takaoka, Y,期刊:Journal Of Vacuum Science & Technology B, 页码:B2110-B2110 , 文章类型: Article,,卷期:2011年29-2]
- Field-emission current from titanium-oxide nanostructures is increased by ultraviolet (UV) light irradiation. The field-emission current after UV irradiation was tens of times larger than that before irradiation. The enh...
- Compensation of space charge for positive ion beams using electron injection and confinement in nonuniform magnetic fields - art. no. 02B118
[作者:Nicolaescu, D; Sakai, S; Gotoh, Y; Ishikawa, J,期刊:Journal Of Vacuum Science & Technology B, 页码:B2118-B2118 , 文章类型: Article,,卷期:2011年29-2]
- Transportation of a low energy ion beam, as required by advanced implantation systems, is difficult due to space charge that makes the beam to diverge. Compensation of space charge may be obtained through electron inject...
- Correlation between low threshold emission and C-N bond in nitrogen-doped diamond films - art. no. 02B119
[作者:Masuzawa, T; Sato, Y; Kudo, Y; Saito, I; Yamada, T; Koh, ATT; Chua, DHC; Yoshino, T; Chun, WJ; Yamasaki, S; Okano, K,期刊:Journal Of Vacuum Science & Technology B, 页码:B2119-B2119 , 文章类型: Article,,卷期:2011年29-2]
- A recent study demonstrated that electron emission occurs from conduction bands of heavily nitrogen (N)-doped diamond, utilizing the benefit of negative electron affinity [H. Yamaguchi et al., Phys. Rev. B 80, 165321 (20...
- SiN membranes with submicrometer hole arrays patterned by wafer-scale nanosphere lithography - art. no. 021012
[作者:Klein, MJK; Montagne, F; Blondiaux, N; Vazquez-Mena, O; Heinzelmann, H; Pugin, R; Brugger, J; Savu, V,期刊:Journal Of Vacuum Science & Technology B, 页码:21012-21012 , 文章类型: Article,,卷期:2011年29-2]
- In this work, nanosphere lithography was integrated with standard microfabrication for the wafer-scale fabrication of silicon nitride (SiN) membranes with arrays of submicrometer holes. A monolayer of polystyrene (PS) be...
- Stabilized electron emission from silicon coated carbon nanotubes for a high-performance electron source - art. no. 02B120
[作者:Ryu, JH; Bae, NY; Oh, HM; Zhou, O; Jang, J; Park, KC,期刊:Journal Of Vacuum Science & Technology B, 页码:B2120-B2120 , 文章类型: Article,,卷期:2011年29-2]
- The authors show that carbon nanotubes (CNTs) coated with an amorphous silicon layer around their periphery show enhanced and stable electron emission. The CNT-field emitter array was grown on silicon substrate through a...
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