- Capillary microchannel fabrication using plasma polymerized TMDS for fluidic MEMS technology - art. no. 045022
[作者:Abbas, A; Supiot, P; Mille, V; Guillochon, D; Bocquet, B,期刊:Journal of Micromechanics and Microengineering, 页码:45022-45022 , 文章类型: Article,,卷期:2009年19-4]
- This paper reports the first use of cold plasma deposition of polymerizable monomers for the fast, cost-effective and easy fabrication of buried air microchannels. A new method named 'plasma polymerization on sacrificial...
- Photodefinable PDMS thin films for microfabrication applications - art. no. 045024
[作者:Jothimuthu, P; Carroll, A; Bhagat, AAS; Lin, G; Mark, JE; Papautsky, I,期刊:Journal of Micromechanics and Microengineering, 页码:45024-45024 , 文章类型: Article,,卷期:2009年19-4]
- In this work, direct patterning of polydimethylsiloxane (PDMS) is demonstrated by the addition of a UV-sensitive photoinitiator benzophenone. As an improvement to our previous work, patterns with both positive and negati...
- Surface finishing of micro-EDM holes using deionized water - art. no. 045025
[作者:Chung, DK; Shin, HS; Kim, BH; Park, MS; Chu, CN,期刊:Journal of Micromechanics and Microengineering, 页码:45025-45025 , 文章类型: Article,,卷期:2009年19-4]
- In this paper, with the use of deionized water, a finishing process of micro hole surfaces processed by micro electrical discharge machining (micro-EDM) is investigated. A micro hole is machined by micro-EDM using deioni...
- Reduction of droplet-size dispersion in parallel flow-focusing microdevices using a passive method - art. no. 045029
[作者:Luque, A; Perdigones, F; Esteve, J; Montserrat, J; Ganan-Calvo, A; Quero, JM,期刊:Journal of Micromechanics and Microengineering, 页码:45029-45029 , 文章类型: Article,,卷期:2009年19-4]
- Flow-focusing devices can be used to produce microparticles at low cost, with the added advantage of low dispersion in the size of the generated particles. However, when multiple parallel devices are used with common inp...
- The align-and-shine technique for series production of photolithography patterns on optical fibres - art. no. 047001
[作者:Petrusis, A; Rector, JH; Smith, K; de Man, S; Iannuzzi, D,期刊:Journal of Micromechanics and Microengineering, 页码:47001-47001 , 文章类型: Article,,卷期:2009年19-4]
- We present a new technique for the fabrication of arbitrary photolithography patterns on the cleaved facet of an optical fibre. The fibre, coated with photoresist, is aligned and brought into contact with the lithography...
- Experimental characterization of two-axis MEMS scanners with hidden radial vertical combdrive actuators and cross-bar spring structures - art. no. 045002
[作者:Tsai, JC; Hsieh, TL; Liao, CD; Chiou, SJ; Hah, D; Wu, MC,期刊:Journal of Micromechanics and Microengineering, 页码:45002-45002 , 文章类型: Article,,卷期:2009年19-4]
- In this paper, we perform the experimental characterization of two-axis MEMS scanners driven by radial vertical combdrive actuators. The dc scan ranges are limited by the pull-in effect. Each scanner utilizes a cross-bar...
- Solid-state microscale lithium batteries prepared with microfabrication processes - art. no. 045004
[作者:Song, J; Yang, X; Zeng, SS; Cai, MZ; Zhang, LT; Dong, QF; Zheng, MS; Wu, ST; Wu, QH,期刊:Journal of Micromechanics and Microengineering, 页码:45004-45004 , 文章类型: Article,,卷期:2009年19-4]
- The miniaturization of power sources is important for meeting the requirements of low power, mass and volume for nano- or microelectronics and MEMS devices. In this paper a dexterous microfabrication process was develope...
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