- Butterfly-shaped ultra slim piezoelectric ultrasonic linear motor
[作者:Lee, WH; Kang, CY; Paik, DS; Ju, BK; Yoon, SJ,期刊:Sensors And Actuators A-Physical, 页码:127-130 , 文章类型: Article,,卷期:2011年168-1]
- A new piezoelectric ultrasonic linear motor, shaped 'Butterfly' wings, has been developed for use in thin electronic products, such as cellular phones and PDAs. The butterfly piezoelectric transducer with a volume of 9 m...
- Two degree-of-freedom micromirror actuation using thermocapillary effect in liquid droplets
[作者:Dhull, RK; Fuller, L; Kao, PC; Liao, YC; Lu, YW,期刊:Sensors And Actuators A-Physical, 页码:162-167 , 文章类型: Article,,卷期:2011年168-1]
- A novel way to manipulate micro-objects using thermocapillary effect in a liquid droplet is presented for the application in optical scanning micromirror. Thermally induced, the surface tension gradients cause convection...
- Low-cost high performance disposable micropump for fluidic delivery applications
[作者:Cantwell, ML; Amirouche, F; Citerin, J,期刊:Sensors And Actuators A-Physical, 页码:187-194 , 文章类型: Article,,卷期:2011年168-1]
- A fully integrated low cost micropump is presented, including actuation, valving, electronics, sensing and control. The unique architecture and electromagnetic pumping technology enables contactless sensing and actuation...
- MEMS micromirror integrated endoscopic probe for optical coherence tomography bioimaging
[作者:Mu, XJ; Sun, W; Feng, HH; Yu, AB; Chen, KWS; Fu, CY; Olivo, M,期刊:Sensors And Actuators A-Physical, 页码:202-212 , 文章类型: Article,,卷期:2011年168-1]
- A prototype of an optical coherence tomography (OCT) bioimaging endoscopic probe utilizing a MEMS micromirror as the light beam manipulator has been developed. The MEMS micromirror and the silicon optical bench (SiOB) as...
- Fabrication of normally-closed bidirectional micropumps in silicon-polymer technology featuring photopatternable silicone valve lips
[作者:Lemke, T; Biancuzzi, G; Feth, H; Huber, J; Goldschmidtboing, F; Woias, P,期刊:Sensors And Actuators A-Physical, 页码:213-222 , 文章类型: Article,,卷期:2011年168-1]
- This publication presents novel, normally-closed, bidirectional micropumps. Their main innovation is a fabrication process that combines traditional silicon micromachining with innovative, multifunctional polymer technol...
- Fabrication of angle beam two-element ultrasonic transducers with PMN-PT single crystal and PMN-PT/epoxy 1-3 composite for NDE applications
[作者:Zhang, YY; Wang, S; Liu, DA; Zhang, QH; Wang, W; Ren, B; Zhao, XY; Luo, HS,期刊:Sensors And Actuators A-Physical, 页码:223-228 , 文章类型: Article,,卷期:2011年168-1]
- The paper describes the fabrication of angle beam two-element prototype ultrasonic transducers with PMN-PT single crystal and PMN-PT/epoxy 1-3 composite. The optimal designs of transducers were obtained based on the simu...
- Mechanical property characterization of sputtered and plasma enhanced chemical deposition (PECVD) silicon nitride films after rapid thermal annealing
[作者:Wu, PH; Lin, IK; Yan, HY; Ou, KS; Chen, KS; Zhang, X,期刊:Sensors And Actuators A-Physical, 页码:117-126 , 文章类型: Article,,卷期:2011年168-1]
- In this paper, the mechanical and fracture properties of silicon nitride films subjected to rapid thermal annealing (RTA) have been systemically tested. The residual stress, Young's modulus, hardness, fracture toughness,...
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