- A slow-adapting microfluidic-based tactile sensor - art. no. 085002
[作者:Tseng, WY; Fisher, JS; Prieto, JL; Rinaldi, K; Alapati, G; Lee, AP,期刊:Journal of Micromechanics and Microengineering, 页码:85002-85002 , 文章类型: Article,,卷期:2009年19-8]
- We present a microfluidic-based tactile sensor mimicking the human slow-adapting mechanoreceptor such as Merkel's disc. The sensor is composed of a polyimide (PI)/polydimethylsiloxane (PDMS) multilayer structure. The dev...
- A nanomechanical switch for integration with CMOS logic - art. no. 085003
[作者:Czaplewski, DA; Patrizi, GA; Kraus, GM; Wendt, JR; Nordquist, CD; Wolfley, SL; Baker, MS; de Boer, MP,期刊:Journal of Micromechanics and Microengineering, 页码:85003-85003 , 文章类型: Article,,卷期:2009年19-8]
- We designed, fabricated and measured the performance of nanoelectromechanical (NEMS) switches. Initial data are reported with one of the switch designs having a measured switching time of 400 ns and an operating voltage ...
- 3D visualization of two-phase flow in the micro-tube by a simple but effective method - art. no. 085005
[作者:Fu, X; Zhang, P; Hu, H; Huang, CJ; Huang, Y; Wang, RZ,期刊:Journal of Micromechanics and Microengineering, 页码:85005-85005 , 文章类型: Article,,卷期:2009年19-8]
- The present study provides a simple but effective method for 3D visualization of the two-phase flow in the micro-tube. An isosceles right-angle prism combined with a mirror located 45. bevel to the prism is employed to s...
- A microcasted PDMS vacuum pad and its application for stacking thin ceramic layers - art. no. 085008
[作者:Hwang, SJ; Lee, SM; Jung, ID; Jung, PG; Go, JS; Ko, JS,期刊:Journal of Micromechanics and Microengineering, 页码:85008-85008 , 文章类型: Article,,卷期:2009年19-8]
- A PDMS vacuum pad for stacking very thin green sheets with a 3 mu m thick dielectric layer is introduced and fabricated. Its applicability for producing multi-layer ceramic capacitors (MLCCs) is evaluated. Five micro-hol...
- Fully integrated low-loss band-pass filters for wireless applications - art. no. 085009
[作者:Rais-Zadeh, M; Kapoor, A; Lavasani, HM; Ayazi, F,期刊:Journal of Micromechanics and Microengineering, 页码:85009-85009 , 文章类型: Article,,卷期:2009年19-8]
- Fully integrated low insertion loss micromachined band-pass filters are designed and fabricated on the silicon substrate (rho = 10-20 Omega cm, epsilon(r) = 11.9) for UHF applications. Filters are made of silver, which h...
- Thermomechanical behavior and microstructural evolution of SiNx/Al bimaterial microcantilevers - art. no. 085010
[作者:Lin, IK; Zhang, X; Zhang, YH,期刊:Journal of Micromechanics and Microengineering, 页码:85010-85010 , 文章类型: Article,,卷期:2009年19-8]
- Bimaterial microcantilevers are used in numerous applications in microelectromechanical systems (MEMS) for thermal, mechanical, optical, tribological and biological functionalities. Unfortunately, the residual stress-ind...
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