- Characterization of 5 MeV proton-irradiated gallium nitride nanowires
[作者:Kim, HY; Ahn, J; Mastro, MA; Eddy, CR; Han, J; Yang, T; Kim, J,期刊:Journal Of Vacuum Science & Technology B, 页码:L11-L13 , 文章类型: Article,,卷期:2009年27-4]
- GaN nanowires were irradiated using a cyclotron at 5 MeV energy with a fluency of up to 3.38x10(15)/cm(2) protons. The resistance of the GaN was increased by 95% at a dose of 1.69x10(15)/cm(2) protons and then 116% at a ...
- Energetic deposition of B-10 on high aspect ratio trenches for neutron detectors
[作者:Klepper, CC; Monteiro, OR; Carlson, EP; Keitz, MD,期刊:Journal Of Vacuum Science & Technology B, 页码:L14-L17 , 文章类型: Article,,卷期:2009年27-4]
- Filtered cathodic arc deposition of fully ionized boron (B) was used to fill similar to 2 mu m wide trenches in silicon, having a depth:width ratio of up to 3:1. Optimal, void-free, infill is achieved with proper balance...
- Sub-10-nm nanolithography with a scanning helium beam
[作者:Sidorkin, V; van Veldhoven, E; van der Drift, E; Alkemade, P; Salemink, H; Maas, D,期刊:Journal Of Vacuum Science & Technology B, 页码:L18-L20 , 文章类型: Article,,卷期:2009年27-4]
- Scanning helium ion beam lithography is presented as a promising pattern definition technique for dense sub-10-nm structures. The powerful performance in terms of high resolution, high sensitivity, and a low proximity ef...
- Fabrication of all-metal field emitter arrays with controlled apex sizes by molding
[作者:Kirk, E; Tsujino, S; Vogel, T; Jefimovs, K; Gobrecht, J; Wrulich, A,期刊:Journal Of Vacuum Science & Technology B, 页码:1813-1820 , 文章类型: Article,,卷期:2009年27-4]
- The authors proposed a method to fabricate field emitter arrays with uniform apex diameters in tens of nanometer scale based on the molding technique and apply it to fabricate molybdenum field emitter arrays. Apex diamet...
- Design and fabrication of surface acoustic wave delay line for surface acoustic wave chemical-agent sensors
[作者:Zhao, YG; Liu, M; Li, JJ; Niu, JB; Li, DM,期刊:Journal Of Vacuum Science & Technology B, 页码:1821-1824 , 文章类型: Article,,卷期:2009年27-4]
- This article presents a method for designing and fabricating a surface acoustic wave (SAW) delay line for chemical-agent sensors. To improve the frequency stability and detection sensitivity, the authors designed and fab...
- X-ray photoelectron spectroscopy characterization of aminosilane anchored to ZnO nanorod arrays grown by an aqueous solution method with microwave-assisted heating
[作者:Ogata, K; Koike, K; Sasa, S; Inoue, M; Yano, M,期刊:Journal Of Vacuum Science & Technology B, 页码:1834-1837 , 文章类型: Article,,卷期:2009年27-4]
- An intermediate for immobilizing biofunctional molecules, 3-aminopropyltrimethoxysilane (APTMS) was anchored to ZnO nanorod arrays which had been grown by an aqueous solution method with microwave-assisted heating on a-p...
- Deconvolution analyses of secondary ion mass spectrometry shallow depth profiles with depth resolution functions from silicon substrate-based delta-doped samples
[作者:Tomita, M; Tanaka, H; Koike, M; Takeno, S; Hori, Y; Takahashi, M,期刊:Journal Of Vacuum Science & Technology B, 页码:1844-1850 , 文章类型: Article,,卷期:2009年27-4]
- Delta-doped samples were fabricated by electron beam deposition at less than 50 degrees C to obtain ideal delta-doped samples. Depth resolution functions for boron in silicon were evaluated by secondary ion mass spectrom...
- Investigation of etching two-dimensional microhole lattice array on lithium niobate with focused ion beam for fabricating photonic crystals
[作者:Xu, XF; Yan, S; Xue, JM; Wang, YG; Wang, KM; Wang, XL,期刊:Journal Of Vacuum Science & Technology B, 页码:1851-1855 , 文章类型: Article,,卷期:2009年27-4]
- Lithium niobate (LN) is a widely used artificial optic-electronic crystal. A LN surface is an attractive substrate for the fabrication of photonic crystals (PhCs) in order to form useful optical devices. In this work, tw...
- Fabrication of ZnO nanorods by pulsed Nd:YAG laser ablation deposition
[作者:Shen, YQ; Xu, N; Lai, JS; Sun, J; Wu, JD; Ying, ZF; Okada, T,期刊:Journal Of Vacuum Science & Technology B, 页码:1856-1860 , 文章类型: Article,,卷期:2009年27-4]
- ZnO nanorods were fabricated on Si (100) substrate by pulsed laser ablation of ZnO target with background O-2 gas. Nd:YAG laser with wavelength of 532 nm was used as laser source. Field emitted scanning electron microsco...
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