- Multipurpose MEMS thermal sensor based on thermopiles
[作者:Randjelovic, D; Petropoulos, A; Kaltsas, G; Stojanovic, M; Lazic, Z; Djuric, Z; Matic, M,期刊:Sensors And Actuators A-Physical, 页码:404-413 , 文章类型: Article,,卷期:2008年141-2]
- This paper presents design, fabrication and experimental results of multipurpose thermopile based sensor which is compatible with technological processes already developed at IHTM-IMTM for fabrication of pressure sensors...
- Hot embossing of micro-lens array on bulk metallic glass
[作者:Pan, CT; Wu, TT; Chen, MF; Chang, YC; Lee, CJ; Huang, JC,期刊:Sensors And Actuators A-Physical, 页码:422-431 , 文章类型: Article,,卷期:2008年141-2]
- This study presents a new process to fabricate micro-lens array. The process of Micro-Electro-Mechanical Systems (MEMS) includes photoresist reflow technique, and nickel-cobalt (Ni-Co) electroplating to fabricate a first...
- Wearable magnetic locating and tracking system for MEMS medical capsule
[作者:Wu, XD; Hou, WS; Peng, CL; Zheng, XL; Fang, X; He, J,期刊:Sensors And Actuators A-Physical, 页码:432-439 , 文章类型: Article,,卷期:2008年141-2]
- This work focuses on a wearable magnetic tracking technology for the MEMS medical capsule. As a booming non-invasive medical diagnostic technology, the MEMS medical capsule provides effective solutions in deep intestines...
- Effects of BiFeO3 addition on electrical properties and temperature stability of low temperature sintered PZT-PFW-PMN ceramics
[作者:Chao, XL; Yang, ZP; Kang, C; Chang, YF,期刊:Sensors And Actuators A-Physical, 页码:482-488 , 文章类型: Article,,卷期:2008年141-2]
- Pb(Zr,Ti)O-3-Pb(Fe2/3W1/3)O-3-Pb(Mn1/3Nb2/3)O-3 (PZT-PFW-PMN) ceramics doped with BiFeO3 as sintering aids were manufactured in order to develop the low temperature sintering ceramics for piezoelectric devices, and phase...
- Pole-type ground electrode in nozzle for electrostatic field induced drop-on-demand inkjet head
[作者:Lee, S; Byun, D; Jun, D; Choi, J; Kim, Y; Yang, JH; Son, SU; Tran, SBQ; Ko, HS,期刊:Sensors And Actuators A-Physical, 页码:506-514 , 文章类型: Article,,卷期:2008年141-2]
- This paper presents a novel mechanism for an electrostatic field induced drop-on-demand ink-jetting device that features a nozzle with a conductive pole located inside the nozzle, referred to here as a pole-type nozzle. ...
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