- Direct fabrication of rigid microstructures on a metallic roller using a dry film resist - art. no. 015004
[作者:Jiang, LT; Huang, TC; Chang, CY; Ciou, JR; Yang, SY; Huang, PH,期刊:Journal of Micromechanics and Microengineering, 页码:15004-15004 , 文章类型: Article,,卷期:2008年18-1]
- This paper presents a novel method to fabricate a metallic roller mold with microstructures on its surface using a dry film resist (DFR). The DFR is laminated uniformly onto the curvy surface of a copper roller. After th...
- Gentle dry etching of P(VDF-TrFE) multilayer micro actuator structures by use of an inductive coupled plasma - art. no. 015007
[作者:Edqvist, E; Snis, N; Johansson, S,期刊:Journal of Micromechanics and Microengineering, 页码:15007-15007 , 文章类型: Article,,卷期:2008年18-1]
- To fully utilize the actuator properties of poly(vinylidenefluoride) (P(VDF))-based polymers, the electric field has to be rather high and one way to accomplish this, in particular with low voltage drive signals, is to b...
- A piezoelectric microvalve for cryogenic applications - art. no. 015023
[作者:Park, JM; Taylor, RP; Evans, AT; Brosten, TR; Nellis, GF; Klein, SA; Feller, JR; Salerno, L; Gianchandani, YB,期刊:Journal of Micromechanics and Microengineering, 页码:15023-15023 , 文章类型: Article,,卷期:2008年18-1]
- This paper reports on a normally open piezoelectrically actuated microvalve for high flow modulation at cryogenic temperatures. One application envisioned is to control the flow of a cryogen for distributed cooling with ...
- Linearization of a two-axis MEMS scanner driven by vertical comb-drive actuators - art. no. 015015
[作者:Tsai, JC; Lu, LC; Hsu, WC; Sun, CW; Wu, MC,期刊:Journal of Micromechanics and Microengineering, 页码:15015-15015 , 文章类型: Article,,卷期:2008年18-1]
- A driving scheme using a pair of differential voltages (V-x, V-y) over a bias voltage is proposed to linearize the dc characteristic (angle versus voltage) of a two-axis MEMS scanner. The micromirror has a gimbal-less st...
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