- A microfluidic approach to assembling ordered microsphere arrays - art. no. 075027
[作者:Xu, W; Sur, K; Zeng, H; Feinerman, A; Kelso, D; Ketterson, JB,期刊:Journal of Micromechanics and Microengineering, 页码:75027-75027 , 文章类型: Article,,卷期:2008年18-7]
- Hydrodynamic flow through an array of channels has been utilized to assemble microspheres on a flat surface. The channels, about 6 mu m in lateral size, were etched through a 60 mu m thick silicon wafer using deep reacti...
- An electrochemical dopamine sensor with a CMOS detection circuit - art. no. 075028
[作者:Chan, FL; Chang, WY; Kuo, LM; Lin, CH; Wang, SW; Yang, YS; Lu, MSC,期刊:Journal of Micromechanics and Microengineering, 页码:75028-75028 , 文章类型: Article,,卷期:2008年18-7]
- This paper presents the integration of interdigitated microelectrodes and a CMOS circuit for electrochemical sensing of the neurotransmitter dopamine. Gold electrodes with a gap of 3 mu m are fabricated by the lift-off t...
- A high-repetition-rate femtosecond laser for thin silicon wafer dicing - art. no. 075032
[作者:Venkatakrishnan, K; Sudani, N; Tan, B,期刊:Journal of Micromechanics and Microengineering, 页码:75032-75032 , 文章类型: Article,,卷期:2008年18-7]
- In this study, a high-power-high-repetition-rate femtosecond laser was investigated for singulation of silicon wafers. The femtosecond laser used for this investigation, unlike the previously used amplified system, is a ...
- A novel capacitive accelerometer with an eight-beam-mass structure by self-stop anisotropic etching of (100) silicon - art. no. 075005
[作者:Xiao, F; Che, LF; Xiong, B; Wang, YL; Zhou, XF; Li, YF; Lin, YL,期刊:Journal of Micromechanics and Microengineering, 页码:75005-75005 , 文章类型: Article,,卷期:2008年18-7]
- This paper reports a novel capacitive sandwich accelerometer with an eight-beam-mass structure fabricated by self-stop anisotropic wet etching of (1 0 0) silicon and wafer-level Si-Si bonding. In this structure, eight st...
|