- The fabrication of x-ray masks using proton beam writing - art. no. 085010
[作者:Yue, WS; Chiam, SY; Ren, YP; van Kan, JA; Osipowicz, T; Jian, LK; Moser, HO; Watt, F,期刊:Journal of Micromechanics and Microengineering, 页码:85010-85010 , 文章类型: Article,,卷期:2008年18-8]
- We have developed a simplified method of fabricating x-ray masks for deep x-ray lithography by using proton beam writing (PBW) without subsequent soft x-ray copying steps. Combining direct PBW and subsequent electroplati...
- Analytical approximation of the erosion rate and electrode wear in micro electrical discharge machining - art. no. 085011
[作者:Kurnia, W; Tan, PC; Yeo, SH; Wong, M,期刊:Journal of Micromechanics and Microengineering, 页码:85011-85011 , 文章类型: Article,,卷期:2008年18-8]
- Theoretical models have been used to predict process performance measures in electrical discharge machining (EDM), namely the material removal rate (MRR), tool wear ratio (TWR) and surface roughness (SR). However, these ...
- High-speed, high-optical-efficiency laser scanning using a MEMS-based in-plane vibratory sub-wavelength diffraction grating - art. no. 085013
[作者:Zhou, GY; Du, Y; Zhang, QX; Feng, HH; Chau, FS,期刊:Journal of Micromechanics and Microengineering, 页码:85013-85013 , 文章类型: Article,,卷期:2008年18-8]
- In this paper, we report the modeling, fabrication and characterization of a microelectromechanical systems (MEMS)-based sub-wavelength diffraction grating under in-plane motion for high-optical-efficiency high-speed las...
|