- Study of corner compensating structures and fabrication of various shapes of MEMS structures in pure and surfactant added TMAH
[作者:Pal, P; Sato, K; Shikida, M; Gosalvez, MA,期刊:Sensors And Actuators A-Physical, 页码:192-203 , 文章类型: Article,,卷期:2009年154-2]
- In this research, we have studied the various shapes of corner compensation structures such as triangles, squares as well as (110) and < 100 > oriented beams for use with pure and surfactant added tetramethyl ammonium hy...
- Optimization of an electromagnetic comb drive actuator
[作者:Schonhardt, S; Korvink, JG; Mohr, J; Hollenbach, U; Wallrabe, U,期刊:Sensors And Actuators A-Physical, 页码:212-217 , 文章类型: Article,,卷期:2009年154-2]
- We present the first electromagnetic comb drive actuator which allows for over 100 mu m of linear actuator motion at large air gap widths of 25 mu m at 300 coil windings, a structural height of 400 mu m and for an applie...
- A doubly decoupled lateral axis micromachined gyroscope
[作者:Liu, XS; Yang, ZC; Chi, XZ; Cui, J; Ding, HT; Guo, ZY; Lv, B; Lin, LT; Zhao, QC; Yan, GZ,期刊:Sensors And Actuators A-Physical, 页码:218-223 , 文章类型: Article,,卷期:2009年154-2]
- In this paper, a doubly decoupled x-axis gyroscope with novel torsional sensing comb capacitors is presented. The doubly decoupled design is more efficient to suppress mechanical coupling of gyroscope. Both driving and s...
- Micromachined resonators of high Q-factor based on atomic layer deposited alumina
[作者:Chang, YJ; Gray, JM; Imtiaz, A; Seghete, D; Wallis, TM; George, SM; Kabos, P; Rogers, CT; Bright, VM,期刊:Sensors And Actuators A-Physical, 页码:229-237 , 文章类型: Article,,卷期:2009年154-2]
- In this paper, atomic layer deposited (ALD) alumina (Al2O3) has been demonstrated as the structural material for a micro-resonator for the first time. An electrostatically actuated micro-bridge made of chromium (Cr) coat...
- Design, optimization and microfabrication of a micro-direct methanol fuel cell with microblocks in anode structure
[作者:Zhang, Q; Wang, XH; Zhong, LY; Zou, YA; Qiu, XP; Liu, LT,期刊:Sensors And Actuators A-Physical, 页码:247-254 , 文章类型: Article,,卷期:2009年154-2]
- This paper presents a micro-direct methanol fuel cell (mu DMFC) featured by the novel anode structure with microblocks, which stir the methanol solution and make the liquid undulate through the whole channel. Several cha...
- High temperature smart-cut SOI pressure sensor
[作者:Guo, SW; Eriksen, H; Childress, K; Fink, A; Hoffman, M,期刊:Sensors And Actuators A-Physical, 页码:255-260 , 文章类型: Article,,卷期:2009年154-2]
- Piezoresistive pressure sensors based on SMART CUT (R) SOI wafer have been developed, which can be used in extreme high temperature environments. It has been demonstrated that the resistance value of a heavily doped thin...
- Effect of substrate charging on the reliability of capacitive RF MEMS switches
[作者:Czarnecki, P; Rottenberg, X; Soussan, P; Ekkels, P; Muller, P; Nolmans, P; De Raedt, W; Tilmans, HAC; Puers, R; Marchand, L; De Wolf, I,期刊:Sensors And Actuators A-Physical, 页码:261-268 , 文章类型: Article,,卷期:2009年154-2]
- In this paper, we show that Substrate charging is another possible failure mechanism limiting the lifetime of capacitive RF MEMS switches. Switches fabricated on different substrates can exhibit a different lifetime. Als...
- A polyethylene glycol (PEG) microfluidic chip with nanostructures for bacteria rapid patterning and detection
[作者:Yu, JJ; Liu, ZB; Liu, QJ; Yuen, KT; Mak, AFT; Yang, M; Leung, P,期刊:Sensors And Actuators A-Physical, 页码:288-294 , 文章类型: Article,,卷期:2009年154-2]
- This paper presents a new poly(ethylene glycol) (PEG) hydrogel based microchip with patterned nanoporous aluminum oxide membrane (AOM) for bacteria fast patterning and detection with low frequency impedance spectrum. The...
- Rubidium vapor cell with integrated Bragg reflectors for compact atomic MEMS
[作者:Perez, MA; Nguyen, U; Knappe, S; Donley, EA; Kitching, J; Shkel, AM,期刊:Sensors And Actuators A-Physical, 页码:295-303 , 文章类型: Article,,卷期:2009年154-2]
- This paper reports on a method for improving the optical efficiency of micromachined reflectors integrated in rubidium vapor cells for application in atomic MEMS sensors. A hybrid bulk micromachining and multi layer PECV...
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