- Polymer-based flexible tactile sensor up to 32 x 32 arrays integrated with interconnection terminals
[作者:Kim, K; Lee, KR; Kim, WH; Park, KB; Kim, TH; Kim, JS; Pak, JJ,期刊:Sensors And Actuators A-Physical, 页码:284-291 , 文章类型: Article,,卷期:2009年156-2]
- A polymer-based flexible tactile sensor array integrated with interconnection terminals was fabricated with polymer MEMS technologies and electroplating. The tactile sensing arrays were made as 4 x 4,8 x 8, 16 x 16 and 3...
- High-mobility pentacene thin-film phototransistor with poly-4-vinylphenol gate dielectric
[作者:Kwon, JH; Chung, MH; Oh, TY; Bae, HS; Park, JH; Ju, BK; Yakuphanoglu, F,期刊:Sensors And Actuators A-Physical, 页码:312-316 , 文章类型: Article,,卷期:2009年156-2]
- An organic thin-film transistor was fabricated with pentacene as the active material and poly(4-vinyl phenol) as the gate-dielectric material. Atomic force microscope image shows that the pentacene film grows in the poly...
- Characterization and patterning of novel high-TCR Ta-Si-N thin films for sensor application
[作者:Chung, CK; Chang, YL; Wu, JC; Jhu, JJ; Chen, TS,期刊:Sensors And Actuators A-Physical, 页码:323-327 , 文章类型: Article,,卷期:2009年156-2]
- Temperature coefficient of resistance (TCR) and resistivity of films are crucial factors for thermal resistive sensors and concerned with microstructure. In this paper, a Ta-Si-N thin film with high negative TCR of -6250...
- High aspect ratio PMMA posts and characterization method for micro coils manufactured with an automatic wire bonder
[作者:Kratt, K; Badilita, V; Burger, T; Mohr, J; Borner, M; Korvink, JG; Wallrabe, U,期刊:Sensors And Actuators A-Physical, 页码:328-333 , 文章类型: Article,,卷期:2009年156-2]
- We present the development of high aspect ratio PMMA posts manufactured in deep X-ray lithography technology. The posts serve as support structures for micro coil windings. The coils are wound around these cores by an au...
- Tunable dual-frequency RF MEMS rectangular slot ring antenna
[作者:Topalli, K; Erdil, E; Civi, OA; Demir, S; Koc, S; Akin, T,期刊:Sensors And Actuators A-Physical, 页码:373-380 , 文章类型: Article,,卷期:2009年156-2]
- This paper presents the design, fabrication, and measurement of a novel, tunable, dual frequency rectangular slot antenna using RF MEMS technology. The antenna tuning is achieved by electrostatically actuated RF MEMS var...
- Ellipsometry study of the adsorbed surfactant thickness on Si{110} and Si{100} and the effect of pre-adsorbed surfactant layer on etching characteristics in TMAH
[作者:Tang, B; Pal, P; Gosalvez, MA; Shikida, M; Sato, K; Amakawa, H; Itoh, S,期刊:Sensors And Actuators A-Physical, 页码:334-341 , 文章类型: Article,,卷期:2009年156-2]
- This paper discusses the dependence of the etching properties of single-crystal silicon in tetramethyl ammonium hydroxide (TMAH) solutions containing small amounts of Triton X-100 surfactant on the preferential adsorptio...
- Modeling, characterization and fabrication of vibration energy harvester using Terfenol-D/PZT/Terfenol-D composite transducer
[作者:Dai, XZ; Wen, YM; Li, P; Yang, J; Zhang, GY,期刊:Sensors And Actuators A-Physical, 页码:350-358 , 文章类型: Article,,卷期:2009年156-2]
- Vibration energy harvesting has been receiving a considerable amount of interest as a means of powering wireless sensors and low-power devices. In this paper, an energy harvester is presented to convert ambient mechanica...
- Cylindrical ultrasonic linear microactuator based on quasi-traveling wave propagation on a thin film metallic glass pipe supported by a piezoelectric ceramic tube
[作者:Sun, D; Wang, S; Hata, S; Sakurai, J; Shimokohbe, A,期刊:Sensors And Actuators A-Physical, 页码:359-365 , 文章类型: Article,,卷期:2009年156-2]
- A novel ultrasonic linear microactuator with a circular cylindrical stator and slider structure is presented. The stator consists of a cylindrical piezoelectric ceramic tube and an elastic material, a thin film metallic ...
|