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  • Highly sensitive strained AlN on Si(111) resonators
    [作者:Placidi, M; Moreno, JC; Godignon, R; Mestres, N; Frayssinet, E; Semond, F; Serre, C,期刊:Sensors And Actuators A-Physical, 页码:64-68 , 文章类型: Article,,卷期:2009年150-1]
  • In this study, we report two methods to fabricate freestanding single-crystalline aluminium nitride micromechanical device structures on Si(111) substrates. A method based only on Si etching techniques is demonstrated, a...