- Very High Sensitivity Displacement Sensor Based on Resonant Cavities
[作者：Etxebarria, V; Lucas, J; Feuchtwanger, J; Sadeghzadeh, A; Hassanzadegan, H; Garmendia, N; Portilla, J,期刊：IEEE Sensors Journal, 页码：1335-1336 , 文章类型： 期刊论文，,卷期：2010年10-8]
- Anew way of sensing displacement for subnanometric applications using RF resonant cavities is presented and experimentally demonstrated on a laboratory prototype. The new sensor physical principle of operation is summari...
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