- Replication of polyethylene nano-micro hierarchical structures using ultrasonic forming
[作者:Lee, CH; Jung, PG; Lee, SM; Park, SH; Shin, BS; Kim, JH; Hwang, KY; Kim, KM; Ko, JS,期刊:Journal of Micromechanics and Microengineering, 页码:35018-35018 , 文章类型: Article,,卷期:2010年20-3]
- We present the replication of polyethylene (PE) nano-micro hierarchical structures and their application for superhydrophobic surfaces. A commercial ultrasonic welding system was used to apply ultrasonic vibration energy...
- Growth and characterization of nitrogen-doped polycrystalline 3C-SiC thin films for harsh environment MEMS applications
[作者:Liu, F; Carraro, C; Pisano, AP; Maboudian, R,期刊:Journal of Micromechanics and Microengineering, 页码:35011-35011 , 文章类型: Article,,卷期:2010年20-3]
- Polycrystalline 3C-SiC films, in situ doped with nitrogen, are grown by low-pressure chemical vapor deposition (LPCVD) on 100 mm Si (1 0 0) wafers at 800 degrees C using methylsilane and ammonia precursors. The effects o...
- Improving mixing efficiency of a polymer micromixer by use of a plastic shim divider
[作者:Li, L; Lee, LJ; Castro, JM; Yi, AY,期刊:Journal of Micromechanics and Microengineering, 页码:35012-35012 , 文章类型: Article,,卷期:2010年20-3]
- In this paper, a critical modification to a polymer based affordable split-and-recombination static micromixer is described. To evaluate the improvement, both the original and the modified design were carefully investiga...
- The shape of a step structure as a design aspect to control droplet generation in microfluidics
[作者:Sim, SPC; Kang, TG; Yobas, L; Holtze, C; Weitz, DA,期刊:Journal of Micromechanics and Microengineering, 页码:35010-35010 , 文章类型: Article,,卷期:2010年20-3]
- In this paper, silicon-based devices with a step structure integrated at the flow-focusing junction were designed, fabricated and characterized for droplet generation. A two-step silicon etching method was demonstrated t...
- Fabrication and characterization of implantable and flexible nerve cuff electrodes with Pt, Ir and IrOx films deposited by RF sputtering
[作者:Lee, SH; Jung, JH; Chae, YM; Suh, JKF; Kang, JY,期刊:Journal of Micromechanics and Microengineering, 页码:35015-35015 , 文章类型: Article,,卷期:2010年20-3]
- This paper presents the fabrication and characterization of implantable and flexible nerve cuff electrodes for neural interfaces using the conventional BioMEMS technique. In order to fabricate a flexible nerve electrode,...
- Manipulation and in situ transmission electron microscope characterization of sub-100 nm nanostructures using a microfabricated nanogripper
[作者:Cagliani, A; Wierzbicki, R; Occhipinti, L; Petersen, DH; Dyvelkov, KN; Sukas, OS; Herstrom, BG; Booth, T; Boggild, P,期刊:Journal of Micromechanics and Microengineering, 页码:35009-35009 , 文章类型: Article,,卷期:2010年20-3]
- We present here a polysilicon electrothermal microfabricated nanogripper capable of manipulating nanowires and nanotubes in the sub-100 nm range. The nanogripper was fabricated with a mix and match microfabrication proce...
- BETTS: bonding, exposing and transferring technique in SU-8 for microsystems fabrication
[作者:Aracil, C; Perdigones, F; Moreno, JM; Quero, JM,期刊:Journal of Micromechanics and Microengineering, 页码:35008-35008 , 文章类型: Article,,卷期:2010年20-3]
- A novel fabrication process called BETTS (bonding, UV exposing and transferring technique in SU-8) is presented in this paper. SU-8 layers can be transferred and patterned over SU-8 microstructures by means of a removabl...
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