- Vibration energy harvesting with aluminum nitride-based piezoelectric devices - art. no. 094005
[作者:Elfrink, R; Kamel, TM; Goedbloed, M; Matova, S; Hohlfeld, D; van Andel, Y; van Schaijk, R,期刊:Journal of Micromechanics and Microengineering, 页码:94005-94005 , 文章类型: Article,,卷期:2009年19-9]
- This paper describes the measurement results of piezoelectric energy harvesters with aluminum nitride (AlN) as a piezoelectric material. AlN was chosen for its material properties and for its well-known sputter depositio...
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