- Evaluating three-dimensional effects on the behavior of compliant bistable micromechanisms - art. no. 095001
[作者:Cherry, BB; Howell, LL; Jensen, BD,期刊:Journal of Micromechanics and Microengineering, 页码:95001-95001 , 文章类型: Article,,卷期:2008年18-9]
- Fully compliant bistable micromechanisms (FCBMs) have potential use in numerous applications, including switches, relays, shutters and low-power sensing arrays. Two-dimensional finite element models for these FCBMs have ...
- A nanomechanical system with piezoelectric actuation of a GaAs microbeam - art. no. 095006
[作者:Vopilkin, EA; Shashkin, VI; Drozdov, YN; Daniltsev, VM; Gusev, SA; Shuleshova, IY,期刊:Journal of Micromechanics and Microengineering, 页码:95006-95006 , 文章类型: Article,,卷期:2008年18-9]
- The design of a bymorph GaAs-based microbeam MEMS piezoelectric actuator is proposed. A piezoelectric actuator consisting of a 2 mu m thick microbeam with dimensions 100 x 15 mu m(2) is fabricated. Calculation of the dep...
- Fabrication of a micro-punching head using LIGA and stacking processes - art. no. 095012
[作者:Pan, CT; Wu, TT; Tsai, HY; Chou, MC; Wu, TC,期刊:Journal of Micromechanics and Microengineering, 页码:95012-95012 , 文章类型: Article,,卷期:2008年18-9]
- A simple stacking process to fabricate microstructures with a high aspect ratio of 30 is presented in this study. For the x-ray absorption of a substance, an analytical model of the absorption dosage (exposure dosage) al...
- A versatile and flexible low-temperature full-wafer bonding process of monolithic 3D microfluidic structures in SU-8 - art. no. 095013
[作者:Steigert, J; Brett, O; Muller, C; Strasser, M; Wangler, N; Reinecke, H; Daub, M; Zengerle, R,期刊:Journal of Micromechanics and Microengineering, 页码:95013-95013 , 文章类型: Article,,卷期:2008年18-9]
- We present a versatile fabrication process for the precise fabrication of embedded three-dimensional microfluidic structures in SU-8 photoresist. The full-wafer bond process based on a polyester (PET) handling layer enha...
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