- Twyman-Green-type integrated laser interferometer array for parallel MEMS testing - art. no. 015018
[作者:Oliva, M; Michaelis, D; Dannberg, P; Jozwik, M; Lizewski, K; Kujawinska, M; Zeitner, UD,期刊:Journal of Micromechanics and Microengineering, 页码:15018-15018 , 文章类型: Article,,卷期:2012年22-1]
- In this paper the concept, design and realization of an integrated laser interferometer are presented. The integrated Twyman-Green-type interferometer is based on micro-optical diffraction gratings in the resonance domai...
- Sharp tipped plastic hollow microneedle array by microinjection moulding - art. no. 015016
[作者:Yung, KL; Xu, Y; Kang, CL; Liu, H; Tam, KF; Ko, SM; Kwan, FY; Lee, TMH,期刊:Journal of Micromechanics and Microengineering, 页码:15016-15016 , 文章类型: Article,,卷期:2012年22-1]
- A method of producing sharp tipped plastic hollow microneedle arrays using microinjection moulding is presented in this paper. Unlike traditional approaches, three mould inserts were used to create the sharp tips of the ...
- Piezoelectric polydimethylsiloxane films for MEMS transducers - art. no. 015013
[作者:Wang, JJ; Hsu, TH; Yeh, CN; Tsai, JW; Su, YC,期刊:Journal of Micromechanics and Microengineering, 页码:15013-15013 , 文章类型: Article,,卷期:2012年22-1]
- We have successfully demonstrated the fabrication of piezoelectric polydimethylsiloxane (PDMS) films utilizing multilayer casting, stacking, surface coating and micro plasma discharge processes. To realize the desired el...
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