- Vibration analysis of a piezoelectric micromachined modal gyroscope (PMMG)
[作者:Wu, XS; Chen, WY; Lu, YP; Xiao, QJ; Ma, GY; Zhang, WP; Cui, F,期刊:Journal of Micromechanics and Microengineering, 页码:125008-125008 , 文章类型: Article,,卷期:2009年19-12]
- Piezoelectric micromachined modal gyroscope (PMMG) is a novel kind of rotating rate sensor, which is based on the special thickness-shear vibrating mode of a piezoelectric body. Compared with the general vibratory micro-...
- Orientation- and concentration-dependent surfactant adsorption on silicon in aqueous alkaline solutions: explaining the changes in the etch rate, roughness and undercutting for MEMS applications
[作者:Gosalvez, MA; Tang, B; Pal, P; Sato, K; Kimura, Y; Ishibashi, K,期刊:Journal of Micromechanics and Microengineering, 页码:125011-125011 , 文章类型: Article,,卷期:2009年19-12]
- We combine spectroscopic ellipsometry (SE), Fourier transform infrared spectroscopy (FT-IR), kinetic Monte Carlo simulations (KMC) and convex corner undercutting analysis in order to characterize and explain the effect o...
- Transient response and stability of the AGC-PI closed-loop controlled MEMS vibratory gyroscopes
[作者:Cui, J; Chi, XZ; Ding, HT; Lin, LT; Yang, ZC; Yan, GZ,期刊:Journal of Micromechanics and Microengineering, 页码:125015-125015 , 文章类型: Article,,卷期:2009年19-12]
- This paper presents a detailed study on the transient response and stability of the automatic gain control (AGC) with a proportion-integral (PI) controller for a MEMS vibratory gyroscope, which constructs a closed-loop c...
- Integrated micromachined thermopile IR detectors with an XeF2 dry-etching process
[作者:Xu, DH; Xiong, B; Wang, YL; Liu, MF; Li, T,期刊:Journal of Micromechanics and Microengineering, 页码:125003-125003 , 文章类型: Article,,卷期:2009年19-12]
- Based on the Seebeck effect, the CMOS compatible micromachined thermopile is widely used in infrared detection for its advantages of low-cost, high batch yield, broad spectral response and insensitivity to ambient temper...
- Development, fabrication and characterization of a 3D tactile sensor
[作者:Tibrewala, A; Phataralaoha, A; Buttgenbach, S,期刊:Journal of Micromechanics and Microengineering, 页码:125005-125005 , 文章类型: Article,,卷期:2009年19-12]
- In this paper, a touch trigger probe using one-and five-boss cross-shaped membranes is proposed, which can be used in coordinate measuring machines for three-dimensional measurements. Silicon bulk micromachining is utili...
- Characterization of heavily doped polysilicon films for CMOS-MEMS thermoelectric power generators
[作者:Xie, J; Lee, C; Wang, MF; Liu, YH; Feng, HH,期刊:Journal of Micromechanics and Microengineering, 页码:125029-125029 , 文章类型: Article,,卷期:2009年19-12]
- This paper presents the material characterization of boron- and phosphorus-doped LPCVD polysilicon films for the application of thermoelectric power generators. Electrical resistivity, Seebeck coefficient and thermal con...
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