- Alternative approach in 3D MEMS-IC integration using fluidic self-assembly techniques - art. no. 105002
[作者:Chapuis, YA; Debray, A; Jalabert, L; Fujita, H,期刊:Journal of Micromechanics and Microengineering, 页码:5002-5002 , 文章类型: Article,,卷期:2009年19-10]
- Nowadays, industries are investigating new, original and appropriate solutions to address challenges in 3D MEMS-IC large-scale integration. Self-assembly techniques are among those. We report on an alternative approach i...
- Capabilities of ICP-RIE cryogenic dry etching of silicon: review of exemplary microstructures - art. no. 105005
[作者:Sokmen, U; Stranz, A; Fundling, S; Wehmann, HH; Bandalo, V; Bora, A; Tornow, M; Waag, A; Peiner, E,期刊:Journal of Micromechanics and Microengineering, 页码:5005-5005 , 文章类型: Article,,卷期:2009年19-10]
- Inductively coupled plasma (ICP) cryogenic dry etching was used to etch submicron pores, nano contact lines, submicron diameter pillars, thin and thick cantilevers, membrane structures and anisotropic deep structures wit...
- An endoscopic capsule robot: a meso-scale engineering case study - art. no. 105007
[作者:Quaglia, C; Buselli, E; Webster, RJ; Valdastri, P; Menciassi, A; Dario, P,期刊:Journal of Micromechanics and Microengineering, 页码:5007-5007 , 文章类型: Article,,卷期:2009年19-10]
- A number of unique challenges arise in fabricating and assembling complex mechanisms at the meso-scale (hundreds of microns to centimetres). In general, for a complex multi-part mechanism at this length scale, no single ...
- Versatile micropipette technology based on deep reactive ion etching and anodic bonding for biological applications - art. no. 105013
[作者:Lopez-Martinez, MJ; Campo, EM; Caballero, D; Fernandez, E; Errachid, A; Esteve, J; Plaza, JA,期刊:Journal of Micromechanics and Microengineering, 页码:5013-5013 , 文章类型: Article,,卷期:2009年19-10]
- A novel, versatile and robust technology to manufacture transparent micropipettes, suitable for biological applications, is presented here. Up to three deep reactive ion etchings have been included in the manufacturing p...
- Design and fabrication of a micron scale free-standing specimen for uniaxial micro-tensile tests - art. no. 105015
[作者:Tang, J; Wang, H; Li, SC; Liu, R; Mao, SP; Li, XP; Zhang, CC; Ding, GF,期刊:Journal of Micromechanics and Microengineering, 页码:5015-5015 , 文章类型: Article,,卷期:2009年19-10]
- This paper presents a novel design and fabrication of test chips with a nickel free-standing specimen for the micro uniaxial tensile test. To fabricate test chips on the quartz substrate significantly reduces the fabrica...
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