- Fabrication of a double-sided micro-lens array by a glass molding technique - art. no. 085020
[作者:Huang, CY; Hsiao, WT; Huang, KC; Chang, KS; Chou, HY; Chou, CP,期刊:Journal of Micromechanics and Microengineering, 页码:85020-85020 , 文章类型: 期刊论文,,卷期:2011年21-8]
- In recent years, micro-lens arrays (MLAs) have become important elements of optical systems. One function of MLAs is to create a uniform intensity of light. Compared with one-sided MLAs, the uniformity of light intensity...
- A microfluidic chip for blood plasma separation using electro-osmotic flow control - art. no. 085019
[作者:Jiang, H; Weng, X; Chon, CH; Wu, XD; Li, DQ,期刊:Journal of Micromechanics and Microengineering, 页码:85019-85019 , 文章类型: 期刊论文,,卷期:2011年21-8]
- In this paper, a microfluidic-based chip with two straight microchannels and five branch microchannels was designed and tested to separate blood plasma from a small sample of fresh human blood. The electro-osmotic flow m...
- A poly(vinylidene fluoride)-coated ZnO film bulk acoustic resonator for nerve gas detection - art. no. 085017
[作者:Chen, D; Wang, JJ; Li, DH; Liu, YJ; Song, HW; Liu, QX,期刊:Journal of Micromechanics and Microengineering, 页码:85017-85017 , 文章类型: 期刊论文,,卷期:2011年21-8]
- We apply the film bulk acoustic resonator for the detection of nerve gas. The resonator is consisted of a ZnO piezoelectric stack and a W/SiO2 Bragg reflector. Poly(vinylidene fluoride) (PVDF) is used as the sensing coat...
- 50 nm thick AlN film-based piezoelectric cantilevers for gravimetric detection - art. no. 085023
[作者:Ivaldi, P; Abergel, J; Matheny, MH; Villanueva, LG; Karabalin, RB; Roukes, ML; Andreucci, P; Hentz, S; Defay, E,期刊:Journal of Micromechanics and Microengineering, 页码:85023-85023 , 文章类型: 期刊论文,,卷期:2011年21-8]
- Due to low power operation, intrinsic integrability and compatibility with CMOS processing, aluminum nitride (AlN) piezoelectric (PZE) microcantilevers are a very attractive paradigm for resonant gas sensing. In this pap...
- Modeling, fabrication and demonstration of an electrostatic actuator with a coplanar pre-charged electrode - art. no. 085012
[作者:Yang, HH; Choi, DH; Lee, JO; Yoon, JB,期刊:Journal of Micromechanics and Microengineering, 页码:85012-85012 , 文章类型: 期刊论文,,卷期:2011年21-8]
- We present the modeling, fabrication and measurement results of a novel electrostatic actuator with a coplanar pre-charged electrode. Different from the conventional electrostatic actuator, the pull-in voltage of the pro...
- Three-way flexible cantilever probes for static contact - art. no. 085003
[作者:Wang, F; Petersen, DH; Jensen, HV; Hansen, C; Mortensen, D; Friis, L; Hansen, O,期刊:Journal of Micromechanics and Microengineering, 页码:85003-85003 , 文章类型: 期刊论文,,卷期:2011年21-8]
- In micro four-point probe measurements, three-way flexible L-shaped cantilever probes show significant advantages over conventional straight cantilever probes. The L-shaped cantilever allows static contact to the sample ...
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