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  • Microchemomechanical Systems
    [作者:Randhawa, JS; Laflin, KE; Seelam, N; Gracias, DH,期刊:ADVANCED FUNCTIONAL MATERIALS, 页码:2395-2410 , 文章类型: Article,,卷期:2011年21-13]
  • The development of microchemomechanical systems (MCMS) as an analogy to microelectromechanical systems (MEMS) is reviewed, with the distinction that the mechanical actuation of microscale structures is effected by chemic...