- High performance of compact radical monitoring probe in H-2/N-2 mixture plasma
[作者:Moon, CS; Takeda, K; Takashima, S; Sekine, M; Setsuhara, Y; Shiratani, M; Hori, M,期刊:Journal Of Vacuum Science & Technology B, 页码:L17-L20 , 文章类型: Article,,卷期:2010年28-2]
- The authors have developed a compact monitoring probe for measuring the spatial distribution of the atomic radical densities of hydrogen and nitrogen, employing a vacuum ultraviolet absorption spectroscopy with a high pr...
- Nanosmoothing of single crystal diamond chips by 1 keV Ar+ ion bombardment
[作者:Nagase, T; Kato, H; Pahlovy, SA; Miyamoto, I,期刊:Journal Of Vacuum Science & Technology B, 页码:263-267 , 文章类型: Article,,卷期:2010年28-2]
- In this article the authors have studied the smoothing of diamond chips by irradiating them with 1 keV Ar ion beam at ion incident angles of 0 degrees, 30 degrees, 45 degrees, 60 degrees, and 80 degrees with ion doses fr...
- Phase change memory technology
[作者:Burr, GW; Breitwisch, MJ; Franceschini, M; Garetto, D; Gopalakrishnan, K; Jackson, B; Kurdi, B; Lam, C; Lastras, LA; Padilla, A; Rajendran, B; Raoux, S; Shenoy, RS,期刊:Journal Of Vacuum Science & Technology B, 页码:223-262 , 文章类型: Review,,卷期:2010年28-2]
- The authors survey the current state of phase change memory (PCM), a nonvolatile solid-state memory technology built around the large electrical contrast between the highly resistive amorphous and highly conductive cryst...
- Structural, electrical, and optical characterizations of laser deposited nanometric iron oxide films
[作者:Caricato, AP; Gorbachuk, NT; Korduban, AM; Leggieri, G; Luches, A; Mengucci, P; Mulenko, SA; Valerini, D,期刊:Journal Of Vacuum Science & Technology B, 页码:295-300 , 文章类型: Article,,卷期:2010年28-2]
- The structural, electrical, and optical characteristics of nanometric Fe2O3-x films fabricated on << 100 >> Si and SiO2 substrates by ablating an iron target with a KrF excimer laser in low pressure (0.05-1.0 Pa) O-2 atm...
- Selective growth of tungsten oxide nanowires via a vapor-solid process
[作者:Zhang, HT; Xu, TT; Tang, MZ; Her, TH; Li, SY,期刊:Journal Of Vacuum Science & Technology B, 页码:310-315 , 文章类型: Article,,卷期:2010年28-2]
- Selective growth of tungsten oxide nanowires has been achieved using a vapor-solid (VS) process without the assistance of any catalysts. To achieve selective growth, low vapor supersaturation was employed to suppress the...
- Suspended slab and photonic crystal waveguides in lithium niobate
[作者:Si, GY; Teo, EJ; Bettiol, AA; Teng, JH; Danner, AJ,期刊:Journal Of Vacuum Science & Technology B, 页码:316-320 , 文章类型: Article,,卷期:2010年28-2]
- Suspended waveguides have been widely applied to silicon-on-insulator structures because they are easily fabricated with processing techniques similar to those of integrated circuit design. However, it is difficult to fa...
- Effect of carbon contamination on the printing performance of extreme ultraviolet masks
[作者:Fan, YJ; Yankulin, L; Antohe, A; Thomas, P; Mbanaso, C; Garg, R; Wang, YF; Wust, A; Goodwin, F; Huh, S; Naulleau, P; Goldberg, K; Mochi, I; Denbeaux, G,期刊:Journal Of Vacuum Science & Technology B, 页码:321-328 , 文章类型: Article,,卷期:2010年28-2]
- Carbon contamination is a significant issue with extreme ultraviolet (EUV) masks because it lowers throughput and has potential effects on imaging performance. Current carbon contamination research is primarily focused o...
- Early stages of direct L1(0) FePt nanocluster formation: The effects of plasma characteristics
[作者:Patterson, MM; Cochran, A; Ferina, J; Rui, X; Zimmerman, TA; Sun, Z; Kramer, MJ; Sellmyer, DJ; Shield, JE,期刊:Journal Of Vacuum Science & Technology B, 页码:273-276 , 文章类型: Article,,卷期:2010年28-2]
- The formation of FePt nanoclusters via gas condensation has attracted a great deal of attention. The clusters normally form with the magnetically soft A1 structure rather than the desired L1(0) structure with high magnet...
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